Electro-optic device with novel insulating structure and a method for manufacturing the same
An electro-optic device is disclosed. The electro-optic device includes an insulating layer, a first semiconducting region disposed above the insulating layer and being doped with doping atoms of a first conductivity type, a second semiconducting region disposed above the insulating layer and being doped with doping atoms of a second conductivity type and an electro-optic active region disposed above the insulating layer and between the first semiconducting region and the second semiconducting region. The electro-optic active region includes a first partial active region and a second partial active region and an insulating structure in between. The insulating structure extends perpendicular to the surface of the insulating layer such that there is no overlap of the first partial active region and the second partial active region in the direction perpendicular to the surface of the insulating layer. A method for manufacturing is also disclosed.
1. An electro-optic device, comprising:
an insulating layer;
a first semiconducting region disposed above the insulating layer and being doped with doping atoms of a first conductivity type;
a second semiconducting region disposed above the insulating layer and being doped with doping atoms of a second conductivity type; and
an electro-optic active region disposed above the insulating layer and between the first semiconducting region and the second semiconducting region, the electro-optic active region comprising:
a first semiconducting partial active region being doped with doping atoms of the first conductivity type;
a second semiconducting partial active region being doped with doping atoms of the second conductivity type; wherein the material the first semiconducting partial active region is made of is different from the material the second semiconducting partial active region is made of; and
an insulating structure between the first semiconducting partial active region and the second semiconducting partial active region, wherein the insulating structure extends perpendicular to the surface of the insulating layer such that there is no overlap of the first semiconducting partial active region and the second semiconducting partial active region in the direction perpendicular to the surface of the insulating layer.
2. The electro-optic device of claim 1 , wherein the first semiconducting partial active region is made of any material selected from the group consisting of bulk silicon, gallium arsenide (GaAs), germanium (Ge) and silicon-germanium (SiGe).
3. The electro-optic device of claim 1 , wherein the insulating layer is an oxide layer.
4. The electro-optic device of claim 1 , wherein the first semiconducting region is made of silicon.
5. The electro-optic device of claim 1 , wherein the second semiconducting region is made of poly-silicon.
6. The electro-optic device of claim 1 , wherein the first conductivity type is a p-conductivity type.
7. The electro-optic device of claim 1 , wherein the second conductivity type is an n-conductivity type.
8. The electro-optic device of claim 1 , wherein the electro-optic active region has a rib-shape with a larger height than the first semiconducting region and the second semiconducting region relative to the surface of the insulating layer.
9. The electro-optic device of claim 1 , wherein the first semiconducting partial active region is in electrical contact with the first semiconducting region.
10. The electro-optic device of claim 1 , wherein the second semiconducting partial active region is in electrical contact with the second semiconducting region.
11. The electro-optic device of claim 1 , wherein the first semiconducting partial active region is made of silicon.
12. The electro-optic device of claim 1 , wherein the second semiconducting partial active region is made of poly-silicon.
13. The electro-optic device of claim 1 , wherein the first semiconducting partial active region comprises a first doped region and a second doped region, the first doped region having a doping concentration that is essentially the same as the doping concentration of the second doped region.
14. The electro-optic device of claim 1 , wherein the second semiconducting partial active region comprises a first doped region and a second doped region, the first doped region having a doping concentration that is essentially the same as the doping concentration of the second doped region.
15. The electro-optic device of claim 1 , wherein the first semiconducting partial active region comprises a first doped region and a second doped region, the first doped region having a doping concentration that is lower than the doping concentration of the second doped region.
16. The electro-optic device of claim 1 , wherein the second semiconducting partial active region comprises a first doped region and a second doped region, the first doped region having a doping concentration that is lower than the doping concentration of the second doped region.
17. The electro-optic device of claim 1 , wherein the first semiconducting partial active region comprises a first doped region and a second doped region, the first doped region having a doping concentration that is higher than the doping concentration of the second doped region.
18. The electro-optic device of claim 1 , wherein the second semiconducting partial active region comprises a first doped region and a second doped region, the first doped region having a doping concentration that is higher than the doping concentration of the second doped region.
19. The electro-optic device of claim 1 , wherein the first semiconducting region has a doping concentration that is higher than the doping concentration of the first semiconducting partial active region.
20. The electro-optic device of claim 1 , wherein the second semiconducting region has a doping concentration that is higher than the doping concentration of the second semiconducting partial active region.
21. An electro-optic device, comprising:
an insulating layer;
a first semiconducting region disposed above the insulating layer and being doped with doping atoms of a first conductivity type;
a second semiconducting region disposed above the insulating layer and being doped with doping atoms of a second conductivity type; and
an electro-optic active region disposed above the insulating layer and between the first semiconducting region and the second semiconducting region, the electro-optic active region comprising:
a first semiconducting partial active region being doped with doping atoms of the first conductivity type;
a second semiconducting partial active region being doped with doping atoms of the second conductivity type; wherein the material the first semiconducting partial active region is made of is different from the material the second semiconducting partial active region is made of; and
an insulating structure between the first semiconducting partial active region and the second semiconducting partial active region, wherein the insulating structure extends from the surface of the insulating layer through the electro-optic active region to the top of the electro-optic active region.