Method and system to control movement of a body for nano-scale manufacturing
View Patent ↗Systems to control movement of a template during an imprint lithography process are described. The systems include an orientation stage having an inner frame, and outer frame, and a plurality of actuators coupled between the inner frame and the outer frame to vary translational motion and impart angular motion about a plurality of axes.
1. A system to control movement of a template for use in imprint lithography, comprising:
an orientation stage, coupled to the template, the orientation stage comprising:
an inner frame having a central throughway surrounded by a surface;
an outer frame having a central opening in superimposition with the central throughway;
a template chuck configured to support the template;
a flexure ring coupled to the inner frame and the outer frame and positioned outside of the central throughway and the central opening; and,
a plurality of actuators coupled between the outer frame and the inner frame and configured to tilt the inner frame with respect to the outer frame by facilitating translational motion of the inner frame along a plurality of translation axes (Z 1 , Z 2 , Z 3 ).
2. The system of claim 1 , wherein actuators are configured to reduce a distance between the inner frame and the outer frame along two translation axes (Z 2 , Z 3 ) and increasing a distance between the inner frame and the outer frame along translation axis (Z 1 ) providing angular motion about a tilt axis (T 2 ) in a first direction.
3. The system of claim 1 , further comprising a compliant device, wherein the inner frame is coupled between the outer frame and the compliant device.
4. The system of claim 3 , wherein the compliant device includes a support body, a floating body, and a plurality of flexure arms coupling the floating body to the support body.
5. The system of claim 4 , wherein each of the flexure arms includes:
a first end and a second end;
a first set of flexure joints and a second set of flexure joints;
wherein the first end of each flexure arm is connected to the support body by the first set of flexure joints and the second end of each flexure arm is connect to the floating body by the second set of flexure joints.
6. The system of claim 5 , wherein the flexure arms are configured to provide rotational movement between the support body and the floating body.
7. A system to control movement of a template for use in imprint lithography, comprising:
an orientation stage, coupled to the template, the orientation stage comprising:
an inner frame;
an outer frame;
a flexure ring coupled to the inner frame and the outer frame; and,
a plurality of actuators coupled between the inner frame and the outer frame configured to vary translational motion along two or more translation axes (Z 1 , Z 2 , Z 3 ) located proximate to a periphery of the inner frame and imparting angular motion about one of a plurality of tilt axes (T 1 , T 2 , T 3 ).