Methods and apparatus for temperature control of devices and mechanical resonating structures

1. A device, comprising:

a mechanical resonating structure including

a heating element configured to control a temperature of the mechanical resonating structure, and

a temperature sensor configured to detect the temperature of the mechanical resonating structure,

wherein the mechanical resonating structure is formed at least partially of a piezoelectric material,

wherein the heating element comprises a region of doped material, and

wherein the doped material comprises a doped piezoelectric material.

2. The device of claim 1 , wherein the mechanical resonating structure has a largest dimension of less than approximately 1000 microns.

3. The device of claim 1 , wherein the temperature sensor comprises a conductive trace.

4. The device of claim 3 , wherein at least part of the conductive trace is formed of a metal.

5. The device of claim 3 , wherein at least part of the conductive trace is formed of a conductive semiconductor material.

6. The device of claim 1 , wherein the temperature sensor comprises an electrode of the mechanical resonating structure.

7. The device of claim 1 , wherein the heating element and temperature sensor are configured in a feedback loop.

8. The device of claim 1 , further comprising temperature control circuitry coupled to the temperature sensor and the heating element, and configured to receive an output signal of the temperature sensor indicative of the temperature of the mechanical resonating structure and to provide a control signal to the heating element to adjust an amount of heat produced by the heating element to set the temperature of the mechanical resonating structure to a target value.

9. A device, comprising:

a mechanical resonating structure including

a heating element configured to control a temperature of the mechanical resonating structure, and

a temperature sensor configured to detect the temperature of the mechanical resonating structure,

wherein the mechanical resonating structure is formed at least partially of a piezoelectric material,

wherein the temperature sensor comprises a region of doped material, and

wherein the doped material comprises a doped piezoelectric material.

10. The device of claim 9 , wherein the heating element comprises a conductive trace.

11. The device of claim 10 , wherein at least part of the conductive trace is formed of a metal.

12. The device of claim 10 , wherein at least part of the conductive trace is formed of a conductive semiconductor material.

13. The device of claim 9 , wherein the heating element comprises an electrode of the mechanical resonating structure.

14. A device, comprising:

a mechanical resonating structure including

a heating element configured to control a temperature of the mechanical resonating structure, and

a temperature sensor configured to detect the temperature of the mechanical resonating structure,

wherein the mechanical resonating structure is formed at least partially of a piezoelectric material, and

wherein the mechanical resonating structure is coupled to a substrate having a front surface and a back surface, and wherein the heating element is a first heating element, and wherein the device further comprises a second heating element formed on the back surface of the substrate.

15. The device of claim 14 , further comprising a cap wafer bonded to the substrate, and wherein the device further comprises a third heating element formed on a backside of the cap wafer.

16. The device of claim 15 , wherein the cap wafer comprises integrated circuitry formed on a front side of the cap wafer.

17. The device of claim 16 , wherein the temperature sensor is a first temperature sensor, and wherein the device further comprises a second temperature sensor formed on the front side of the cap wafer.

18. The device of claim 17 , wherein the third heating element and the second temperature sensor are configured as at least part of a temperature control feedback loop.

19. A device, comprising:

a mechanical resonating structure including

a heating element configured to control a temperature of the mechanical resonating structure, and

a temperature sensor configured to detect the temperature of the mechanical resonating structure,

wherein the mechanical resonating formed least partially of a piezoelectric material,

wherein the device further comprises a substrate to which the mechanical resonating structure is coupled, and further comprises a cap wafer bonded to the substrate, and

wherein the heating element is a first heating element, and wherein the device further comprises a second heating element formed on a back side of the cap wafer.

20. The device of claim 19 , wherein the cap wafer comprises integrated circuitry formed on a front side of the cap wafer.

21. The device of claim 19 , wherein the temperature sensor is a first temperature sensor, and wherein the device further comprises a second temperature sensor formed on a front side of the cap wafer.

22. A device, comprising:

a substrate having a front surface and a back surface;

a mechanical resonating structure formed on the front surface of the substrate; and

a heating element formed on or within the substrate,

wherein the mechanical resonating, structure has a largest dimension of less than approximately 100 microns, and

wherein the substrate is a first substrate and the heating element is a first heating element, and wherein the apparatus further comprises a second substrate having a front surface and a back surface, the front surface of the second substrate being bonded to the front surface of the first substrate, and wherein the apparatus further comprises a second heating element formed on the back surface of the second substrate.

23. The device of claim 22 , wherein the mechanical resonating structure comprises a third heating element.

24. The device of claim 23 , wherein the mechanical resonating structure further comprises a temperature sensor.