Stage for scanning probe microscopy and sample observation method
It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.
1. A stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency, comprising:
a light irradiation portion,
the light irradiation portion comprising an opening and a light source, and
the opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view,
wherein light of the light source is irradiated from a bottom surface of the sample substrate onto the sample through the opening; and
the stage for scanning probe microscopy is attached to or detached from the scanning probe microscopy.
2. The stage for scanning probe microscopy according to claim 1 ,
wherein a light irradiating portion that irradiates the light having a wavelength which affects the sample is provided within the opening.
3. The stage for scanning probe microscopy according to claim 2 , further comprising:
a light source portion configured to include a plurality of light sources that emit light components having different wavelengths; and
a waveguide corresponding to light having each wavelength from the light source portion,
wherein each waveguide is combined with the light irradiating portion, and
the light sources are ON/OFF controlled to irradiate the light having a desired wavelength onto the sample.
4. The stage for scanning probe microscopy according to claim 3 ,
wherein a battery connected to the light source portion by a wiring line is provided, as a power source of the light source portion, at the position distant from the stage for scanning probe microscopy.
5. The stage for scanning probe microscopy according to claim 2 ,
wherein light is irradiated from the light irradiating portion using an LED as a light source.
6. The stage for scanning probe microscopy according to claim 2 ,
wherein a battery connected to the light source by a wiring line is provided, as a power source of the light source, at the position distant from the stage for scanning probe microscopy.
7. The stage for scanning probe microscopy according to claim 1 ,
wherein the sample substrate is a mica substrate.
8. The stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency according to claim 1 , wherein a material having high light reflectance is used as a base material for the stage for scanning probe microscopy.
9. A sample observation method of fixing a sample substrate, which mounts a sample to be observed thereon and has optical transparency, to a stage for scanning probe microscopy and observing the sample with a scanning probe microscopy, comprising:
attaching the stage for scanning probe microscopy to the scanning probe microscopy,
irradiating light of a light source from a bottom surface of the sample substrate onto the sample through an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view, wherein
the stage for scanning probe microscopy comprises a light irradiation portion; and
the light irradiation portion comprises the opening and the light source.
10. The sample observation method of fixing a sample substrate, which mounts a sample to be observed thereon and has optical transparency, to a stage for scanning probe microscopy and observing the sample with a scanning probe microscopy according to claim 9 , wherein a material having high light reflectance is used as a base material for the stage for scanning probe microscopy.