Fluid control apparatus
There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency. A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6 a formed integrally therewith. The main body 6 a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.
1. A fluid control apparatus comprising plural types of fluid control devices, base blocks for supporting the fluid control devices, and sealing means for ensuring sealing properties at the portions where fluid flow channels are butted with one another,
wherein at least one of the plural types of fluid control devices is a fluid control device provided with a base block which includes a connection block portion provided with a flow channel opened at the lower surface and also is coupled to one or more base blocks placed thereunder through male screw members from above, the other fluid control devices, out of the plural types of fluid control devices, are fluid control devices provided with no base block which are closed at the lower surfaces of their main bodies and also are provided with no base blocks placed thereunder, and the fluid control device provided with the base block is coupled, at the base block placed thereunder, to the main bodies of the fluid control devices provided with no base block, through male screw members in the forward and rearward directions, such that their lower surfaces are flushed with each other,
wherein the fluid control devices provided with no base block are on-off valves, and the fluid control device provided with the base block is any one of a pressure adjustment device, a filter, a pressure indication device and a flow-rate adjustment device, and
wherein at least one fluid control device provided with the base block is mounted to only a single base block through male screw members from above, so that all of the fluid control device provided with the base block can be extracted upwardly and individually in a state where the fluid control devices provided with the base blocks are coupled, at the base blocks existing at the lower portion, to the main bodies of fluid control devices provided with no base block through male screw members in the forward and rearward directions,
wherein at least one of the fluid control devices provided with no base block is provided, at its main body, with a protruding block portion for supporting a portion of the adjacent fluid control device provided with the base block.