Film forming method and processing system
Provided is a film-forming method for performing a film-forming process on a surface of a target substrate to be processed in an evacuable processing chamber, a recessed portion being formed on the surface of the target substrate. The method includes a transition metal-containing film processing process in which a transition metal-containing film is formed by a heat treatment by using a source gas containing a transition metal; and a metal film forming process in which a metal film containing an element of the group VIII of the periodic table is formed.
1. A film-forming method for performing a film-forming process on a surface of a target substrate to be processed in an evacuable processing chamber, a recessed portion being formed on the surface of the target substrate, the method comprising:
a transition metal-containing film forming process in which a transition metal-containing film is formed by a heat treatment by using a source gas containing a transition metal; and
a metal film forming process in which a metal film containing an element of the group VIII of the periodic table is formed,
wherein the transition metal containing film forming process and the metal film forming process are successively performed in a same processing chamber, and
a mixed layer containing the transition metal and the element of the group VIII is formed by gradually increasing a supply amount of a VIII-group source gas including the element of the group VIII while gradually reducing a supply amount of the transition metal-containing source gas during a transition from the transition metal containing film forming process to the metal film forming process.
2. The method of claim 1 , wherein the heat treatment is a chemical vapor deposition (CVD).
3. The method of claim 2 , wherein the heat treatment is a thermal CVD using the source gas and a reducing gas.
4. The method of claim 1 , wherein a heat treatment is performed in the metal film forming process.
5. The method of claim 4 , wherein the heat treatment in the metal film forming process is a CVD.
6. The method of claim 4 , wherein a plasma is also used in each of the heat treatments.
7. The method of claim 1 , wherein the metal film is formed by a sputtering method in the metal film forming process.
8. The method of claim 1 , further comprising: a filling process in which the recessed portion is filled by depositing a copper film after the metal film forming process.
9. The method of claim 8 , wherein the filling process is performed by a CVD.
10. The method of claim 8 , wherein the filling process is performed by a plating method.
11. The method of claim 8 , wherein the filling process is performed by a sputtering method.
12. The method of claim 8 , further comprising: an annealing process in which the target substrate is annealed after the filling process.
13. The method of claim 1 , wherein a base film of the transition metal-containing film is formed of at least one film selected from a group consisting of a SiO 2 film, a SiOF film, a SiC film, a SiN film, a SiOC film, a SiCOH film, a SiCN film, a porous silica film, a porous methylsilsesquioxane film, a polyarylene film, a SiLK (trademark) film and a fluorocarbon film.
14. The method of claim 1 , wherein a wiring layer is formed at a lower portion of the recessed portion.
15. The method of claim 1 , wherein the transition metal containing source gas includes an organic metal material gas or a metal complex material gas.
16. The method of claim 15 , wherein the transition metal includes manganese (Mn), and
an organic metal material includes at least one material selected from a group consisting of Cp 2 Mn [═Mn(C 5 H 5 ) 2 ], (MeCp) 2 Mn[═Mn(CH 3 C 5 H 4 ) 2 ], (EtCp) 2 Mn[═Mn(C 2 H 5 C 5 H 4 ) 2 ], (i-PrCp) 2 Mn[═Mn(C 3 H 7 C 5 H 4 ) 2 ], MeCpMn(CO) 3 [═(CH 3 C 5 H 4 )Mn(CO) 3 ], (t-BuCp) 2 Mn[═Mn(C 4 H 9 C 5 H 4 ) 2 ], CH 3 Mn(CO) 5 , Mn(DPM) 3 [═Mn(C 11 H 19 O 2 ) 3 ], Mn(DMPD)(EtCp)[═Mn(C 7 H 11 C 2 H 5 C 5 H 4 )], Mn(acac) 2 [═Mn(C 5 H 7 O 2 ) 2 ], Mn(DPM) 2 [═Mn(C 11 H 19 O 2 ) 2 ], Mn(acac) 3 [═Mn(C 5 H 7 O 2 ) 3 ], Mn(hfac) 2 [═Mn(C 5 HF 6 O 2 ) 3 ], and ((CH 3 )sCp) 2 Mn[═Mn ((CH 3 ) 5 C 5 H 4 ) 2 ].
17. The method of claim 1 , wherein the element of the group VIII includes at least one element selected from a group consisting of Fe, Co, Ni, Ru, Rh, Pd, Os, Ir and Pt.
18. A computer-readable non-transitory storage medium storing a computer-readable program to perform the film-forming method of any one of claims 1 to 5 and 7 to 17 .
19. A semiconductor device having a film structure formed by the film-forming method of any one of claims 1 to 5 and 7 to 17 .
20. An electronic apparatus having a film structure formed by the film-forming method of any one of claims 1 to 5 and 7 to 17 .