Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system
The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.
1. A manufacturing method of a radiation detecting apparatus comprising steps of:
preparing a matrix array comprising a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, and a connection electrode for connecting to an external circuit arranged at a periphery of the plurality of pixels, wherein the pixel includes a conversion element converting an incident radiation or light into an electric signal;
fixing a flexible supporting member for covering the plurality of pixels and the connection electrode to the matrix array at a side opposite to the substrate; and
releasing the substrate from the matrix array.
2. The manufacturing method of a radiation detecting apparatus according to claim 1 , wherein
the flexible supporting member is a first electromagnetic shielding layer,
in the step of fixing the flexible supporting member, a first scintillator layer is fixed on the plurality of pixels, the first electromagnetic shielding layer is fixed on the first scintillator layer to form a stacked-layer structure wherein the plurality of pixels, the first scintillator layer and the first electromagnetic shielding layer are laminated in this order.
3. The manufacturing method of a radiation detecting apparatus according to claim 2 , further comprising a step of:
fixing a second scintillator layer on a surface of the insulating layer at a side thereof from which the substrate is released.
4. The manufacturing method of a radiation detecting apparatus according to claim 3 , wherein
a distance between the conversion element and the second scintillator layer is 100 nm-50 micron.
5. The manufacturing method of a radiation detecting apparatus according to claim 2 , further comprising a step of:
fixing a second scintillator layer on a surface of the insulating layer at a side thereof from which the substrate is released, and fixing a second electromagnetic shielding layer on the second scintillator layer.
6. The manufacturing method of a radiation detecting apparatus according to claim 2 , further comprising a step of:
fixing a second scintillator layer and a second electromagnetic shielding layer preliminarily fixed to the second scintillator layer on a surface of the insulating layer at a side thereof from which the substrate is released.
7. The manufacturing method of a radiation detecting apparatus according to claim 2 , further comprising:
a step of connecting electrically the first electromagnetic shielding layer to a ground electrode of the external circuit.
8. The manufacturing method of a radiation detecting apparatus according to claim 1 , wherein
the flexible supporting member is a first electromagnetic shielding layer,
in the step of fixing the flexible supporting member, a first scintillator layer and the first electromagnetic shielding layer preliminarily fixed to the first scintillator layer are fixed on the plurality of pixels, to form a stacked-layer structure wherein the plurality of pixels, the first scintillator layer and the first electromagnetic shielding layer are laminated in this order.
9. The manufacturing method of a radiation detecting apparatus according to claim 8 , further comprising:
a step of connecting electrically the first electromagnetic shielding layer to a ground electrode of the external circuit.
10. The manufacturing method of a radiation detecting apparatus according to claim 1 , wherein
the flexible supporting member is a first scintillator layer,
in the step of fixing the flexible supporting member, a scintillator layer is fixed on the plurality of pixels, a first electromagnetic shielding layer having a metal layer is fixed on the first scintillator layer to form a stacked-layer structure wherein the plurality of pixels, the first scintillator layer and the first electromagnetic shielding layer are laminated in this order.
11. The manufacturing method of a radiation detecting apparatus according to claim 10 , further comprising:
a step of connecting electrically the first electromagnetic shielding layer to a ground electrode of the external circuit.
12. The manufacturing method of a radiation detecting apparatus according to claim 1 , wherein
the flexible supporting member is a first scintillator layer,
in the step of fixing the flexible supporting member, a first scintillator layer and a first electromagnetic shielding layer having a metal layer preliminarily fixed to the first scintillator layer are fixed on the plurality of pixels, the first electromagnetic shielding layer is fixed on the first scintillator layer to form a stacked-layer structure wherein the plurality of pixels, the first scintillator layer and the first electromagnetic shielding layer are laminated in this order.
13. The manufacturing method of a radiation detecting apparatus according to claim 12 , further comprising:
a step of connecting electrically the first electromagnetic shielding layer to a ground electrode of the external circuit.
14. The manufacturing method of a radiation detecting apparatus according to claim 1 , further comprising a step of:
connecting the connection electrode to the external circuit.
15. The manufacturing method of a radiation detecting apparatus according to claim 14 , wherein
the flexible supporting member covers further at least a part of the external circuit.
16. The manufacturing method of a radiation detecting apparatus according to claim 14 , wherein
the connecting the connection electrode is conducted from a side of the insulating layer, after the step of releasing the substrate.
17. The manufacturing method of a radiation detecting apparatus according to claim 1 , further comprising:
a step of fixing a flexible light source to a side of the flexible array, from which the substrate is released, and opposite to a side of the flexible supporting member.
18. A radiation detecting apparatus comprising:
a flexible matrix array comprising an insulating layer, a plurality of pixels arranged on the insulating layer, and a connection electrode for connecting to an external circuit arranged at a periphery of the plurality of pixels, wherein the pixel includes a conversion element converting an incident radiation or light into an electric signal; and
a flexible supporting member covering the plurality of pixels and the connection electrode, and being arranged at a side of the flexible matrix array facing the plurality of pixels.
19. The radiation detecting apparatus according to claim 18 , wherein
the flexible supporting member includes a first electromagnetic shielding layer having a metal layer.
20. The radiation detecting apparatus according to claim 19 , further comprising:
a first scintillator layer arranged between the first electromagnetic shielding layer and the plurality of pixels.
21. The radiation detecting apparatus according to claim 20 , further comprising:
a second scintillator layer arranged to form a stacked-layer structure wherein the second scintillator layer, the flexible matrix array, the first scintillator layer and the first electromagnetic shielding layer are stacked in this order.
22. The radiation detecting apparatus according to claim 21 , wherein a distance between the conversion element and the second scintillator layer is 100 nm-50 micron.
23. The radiation detecting apparatus according to claim 18 , wherein
the flexible supporting member includes a first scintillator layer.
24. The radiation detecting apparatus according to claim 18 , further comprising:
the external circuit connected electrically to the connection electrode, wherein
the flexible supporting member covers further at least a part of the external circuit.
25. The radiation detecting apparatus according to claim 24 , wherein
the first electromagnetic shielding layer is electrically connected to a ground electrode of the external circuit.
26. The radiation detecting apparatus according to claim 18 , further comprising
a flexible light source arranged on a side of the flexible matrix array opposite to a side of the flexible supporting member.
27. The radiation detecting apparatus according to claim 18 , wherein
the conversion element converts the incident radiation into the electric signal directly, and the flexible supporting member is an insulating layer.
28. A radiation imaging apparatus comprising:
a radiation detecting apparatus according to claim 18 ;
a signal processing unit for processing a signal from the radiation detecting apparatus;
a recording unit for recording a signal from the signal processing unit;
a display unit for displaying the signal from the signal processing unit;
a transfer unit for transferring the signal from the signal processing unit; and
a radiation generating source for generating the radiation.