Selective silicide formation using resist etch back
View Patent ↗Methods of selectively forming metal silicides on a memory device are provided. The methods can include forming a mask layer over the memory device; forming a patterned resist over the mask layer; removing upper portions of the patterned resist; forming a patterned mask layer by removing portions of the mask layer that are not covered by the patterned resist; and forming metal silicides on the memory device by a chemical reaction of a metal layer formed on the memory device with portions of the memory device that are not covered by the patterned mask layer. By preventing silicidation of underlying silicon containing layers/components of the memory device that are covered by the patterned mask layer, the methods can selectively form the metal silicides on the desired portions of the memory device.
1. A method of selectively forming metal silicides on a memory device, comprising:
forming spacers adjacent side surfaces of gate electrodes on a silicon substrate of the memory device;
forming a patterned mask layer over portions of the memory device excluding entire top surfaces of the gate electrodes, including:
forming a mask layer over the memory device;
forming a patterned resist over the mask layer only in an area where memory cells do not locate; and
removing portions of the mask layer that are not covered by the patterned resist by contacting the memory device with an etchant solution;
forming a metal layer over the memory device; and
forming metal silicides on the memory device by a chemical reaction of the metal layer with other portions of the memory device that are not covered by the spacers or the patterned mask layer.
2. The method of claim 1 , wherein the spacers are formed adjacent the side surfaces of the gate electrodes of at least one of the memory cells, transistors, or combinations thereof.
3. The method of claim 1 , wherein the metal silicides are formed on the gate electrodes and portions of the silicon substrate that are not covered by the spacers or the patterned mask layer.
4. The method of claim 1 , wherein the patterned mask layer comprises silicon dioxide.
5. The method of claim 1 , wherein the spacers comprise oxide materials and the patterned mask layer comprises nitride.
6. A method of selectively forming metal silicides on a memory device, comprising:
forming spacers adjacent side surfaces of gate electrodes on a silicon substrate of the memory device;
removing substantially any oxide on an uppermost surface of the memory device;
forming a patterned mask layer over portions of the memory device excluding entire top surfaces of the gate electrodes, including:
forming a mask layer over the memory device;
forming a patterned resist over the mask layer in an area where memory cells do not locate; and
removing portions of the mask layer that are not covered by the patterned resist by contacting the memory device with an etchant solution;
forming a metal layer over the memory device;
forming metal silicides on the memory device by a chemical reaction of the metal layer with other portions of the memory device that are not covered by the spacers or the patterned mask layer; and
preventing formation of metal silicides on the portions of the memory device that are covered by the patterned mask layer.
7. The method of claim 6 , wherein the spacers are formed adjacent the side surfaces of the gate electrodes of at least one of the memory cells, transistors, or combinations thereof.
8. The method of claim 6 , wherein the metal silicides are formed on the gate electrodes and portions of the silicon substrate that are not covered by the spacers or the patterned mask layer.
9. The method of claim 6 , wherein the patterned mask layer comprises silicon dioxide.
10. The method of claim 6 , wherein the spacers comprise oxide materials and the patterned mask layer comprises nitride.
11. A method of selectively forming metal silicides on a memory device, comprising:
forming spacers adjacent side surfaces of gate electrodes on a silicon substrate of the memory device;
forming a patterned mask layer over portions of the memory device excluding entire top surfaces of the gate electrodes, including:
forming a mask layer over the memory device;
forming a patterned resist over the mask layer in an area where memory cells do not locate; and
removing portions of the mask layer that are not covered by the patterned resist by contacting the memory device with hydrofluoric acid solution;
forming a metal layer over the memory device;
forming metal silicides on the memory device by a chemical reaction of the metal layer with other portions of the memory device that are not covered by the spacers or the patterned mask layer; and
preventing formation of metal silicides on the portions of the memory device that are covered by the patterned mask layer;
wherein the spacers have a substantially different etch selectivity from the patterned mask layer.
12. The method of claim 11 , wherein the spacers are formed adjacent the side surfaces of the gate electrodes of at least one of the memory cells, transistors, or combinations thereof.
13. The method of claim 11 , wherein the metal silicides are formed on the gate electrodes and portions of the silicon substrate that are not covered by the spacers or the patterned mask layer.
14. The method of claim 11 , wherein the patterned mask layer comprises silicon dioxide.
15. The method of claim 1 , wherein the etchant solution is hydrofluoric acid.
16. The method of claim 1 , wherein the etchant solution is phosphoric acid.
17. The method of claim 1 , wherein a height of an uppermost surface of the patterned resist being lower than a height of an uppermost surface of the gate electrodes and a height of an uppermost portion of the spacers.
18. The method of claim 6 , wherein a height of an uppermost surface of the patterned resist being lower than a height of an uppermost surface of the gate electrodes and a height of an uppermost portion of the spacers.
19. The method of claim 6 , wherein the etchant solution is hydrofluoric acid.
20. The method of claim 6 , wherein the etchant solution is phosphoric acid.