Side wall pore sealing for low-k dielectrics
A dual damascene process for forming conductive interconnects on an integrated circuit die. The process includes providing a layer ( 16 ) of porous, ultra low-k (ULK) dielectric material in which a via opening ( 30 ) is subsequently formed. A thermally degradable polymeric (“porogen”) material ( 42 ) is applied to the side wall sidewalls of the opening ( 30 ) such that the porogen material penetrates deeply into the porous ULK dielectric material (thereby sealing the pores and increasing the density thereof). Once a conductive material ( 36 ) has been provided with the opening ( 30 ) and polished back by means of chemical mechanical polishing (CMP), the complete structure is subjected to a curing step to cause the porogen material ( 44 ) with the ULK dielectric layer ( 16 ) to decompose and evaporate, thereby restoring the porosity (and low-k value) of the dielectric layer ( 16 ). Attached are a marked-up copy of the originally filed specification and a clean substitute specification in accordance with 37 C.F.R. §§1.121(b)(3) and 1.125(c). Applicant respectfully submits that the substitute specification contains no new matter.
1. A method of forming a conductive interconnect structure on an integrated circuit die, the method comprising:
providing a layer of porous, low-k dielectric material;
removing a selected portion of said dielectric material to form a respective opening;
applying a porogen material to said dielectric material, wherein said porogen material penetrates horizontally from the formed opening into said dielectric material;
providing a conductive material in said opening to form said conductive interconnect structure; and
subsequently curing and removing said porogen material from said dielectric material.
2. The method according to claim 1 , further comprising:
applying said porogen material to said dielectric material after formation of said opening.
3. The method according to claim 2 , further comprising:
applying said porogen material to a sidewall of said opening.
4. The method according to claim 1 , wherein said porogen material comprises a thermally degradable polymer material.
5. The method according to claim 1 , further comprising:
subsequent to the application of the porogen material to the sidewalls of the via opening, applying a layer of barrier material to said sidewalls prior to the provision of the conductive material in said via opening.
6. The method according to claim 5 , further comprising:
using an atomic layer deposition process to provide said layer of barrier material.
7. The method according to claim 1 , wherein said conductive material is copper.
8. A conductive interconnect formed by means of the method of claim 1 .
9. An integrated circuit die comprising therein a plurality of conductive interconnects according to claim 8 .