Conveyor robot
A conveyor robot ( 10 ) includes a main body ( 12 ), a first arm ( 18 ), and a second arm ( 16 ). The first arm ( 18 ) is designed to be reciprocable between a wafer cassette and a position above the main body ( 12 ). The first arm ( 18 ) is provided with a first hand ( 182 ) having a plurality of gripping portions designed to grip a wafer. The second arm ( 16 ) is designed to be reciprocable between a position above the main body ( 12 ) and a wafer stage. The second arm ( 16 ) is provided with a second hand ( 162 ) having a plurality of gripping portions designed to grip the wafer from a different angle than do the gripping portions of the first hand ( 182 ). The gripping portions of the first hand ( 182 ) and those of the second hand ( 162 ) are positioned at equal height.
1. A conveyor robot designed to convey a work between a work cassette having a plurality of work storage slots and a work stage forming a front part of a processing apparatus along a linear conveyance path by two arms each having a hand gripping the work and to pass the work from one hand of the arms to the other hand of the arms during conveying the work, the conveyor robot comprising:
a main body;
a first arm movably supported on the main body and designed to be reciprocable between the work cassette and a position above the main body; and
a second arm movably supported on the main body and designed to be reciprocable between a position above the main body and the work stage,
the first arm being provided with a first hand having a plurality of gripping claws designed to support the work from below and to be retractable below a work carrying surface,
the second arm being provided with a second hand having a pair of gripping pieces designed to hold the work at sides of the work, the second hand being positioned higher than the first hand, wherein
after the gripping claws of the first hand that support the work and the gripping pieces of the second hand being positioned at equal height in passing the work, the pair of the gripping pieces of the second hand are designed to hold the work between the pieces, and the plurality of gripping claws of the first hand are designed to retract below the work carrying surface of the first hand.
2. The conveyor robot according to claim 1 , wherein:
the gripping claws of the first hand are designed to grip the work from opposite sides in a direction parallel with a direction in which the first hand moves; and
the gripping pieces of the second hand are designed to grip the work from opposite sides in a direction perpendicular to a direction in which the second hand moves.