Semiconductor device and method of manufacturing the same
A semiconductor device includes a first transistor including a first source/drain region and a first sidewall spacer, and a second transistor including a second source/drain region and a second sidewall spacer, the first sidewall spacer has a first width and the second sidewall spacer has a second width wider than the first width, and the first source/drain region has a first area and the second source/drain region has a second area larger than the first area.
1. A method of manufacturing a semiconductor device, the method comprising:
forming an element isolation region in a semiconductor substrate to represent an element region;
forming a gate electrode over the element region;
forming a first sidewall spacer having a first width over the semiconductor substrate of a first side of the gate electrode;
forming a second sidewall spacer having a second width over the semiconductor substrate of a second side of the gate electrode, the second width is wider than the first width;
implanting first impurities into the element region, using the gate electrode and the first sidewall spacer as a first mask, to form a first impurity region in the semiconductor substrate of the first side of the gate electrode, and using the gate electrode and the second sidewall spacer as a mask to form a second impurity region in the semiconductor substrate of the second side of the gate electrode; and
activating the first impurities in the first impurity region and the second impurity region by heat treatment,
wherein the first impurity region is smaller than the second impurity region, and an impurity concentration in the first impurity region is substantially equal to an impurity concentration in the second impurity region.
2. The method according to claim 1 , wherein the second sidewall spacer includes a first insulation film and a second insulation film, and the first sidewall spacer includes a third insulation film.
3. The method according to claim 1 , further comprising:
forming silicide films on the first impurity region and the second impurity region after activating the first impurities.
4. The method according to claim 2 , further comprising:
removing the second insulation film from the second sidewall spacer after activating the first impurities; and
then forming silicide films on the first impurity region and the second impurity region.
5. The method according to claim 1 , further comprising:
implanting second impurities into the element region, using the gate electrode as a third mask, to form an extension region after forming of the gate electrode and before forming of the first sidewall spacer and the second sidewall spacer.