Thin film transistor array panel and method for manufacturing the same
A manufacturing method of a thin film transistor (TFT) includes forming a gate electrode including a metal that can be combined with silicon to form silicide on a substrate and forming a gate insulation layer by supplying a gas which includes silicon to the gate electrode at a temperature below about 280° C. The method further includes forming a semiconductor on the gate insulation layer, forming a data line and a drain electrode on the semiconductor and forming a pixel electrode connected to the drain electrode.
1. A method of manufacturing a thin film transistor array panel, comprising:
forming a gate electrode including a metal that can be combined with silicon to form silicide on a substrate;
forming a gate insulation layer by supplying a gas which includes silicon to the gate electrode at a temperature below about 280° C., wherein when forming the gate insulation layer, the temperature of the substrate is in a range of about 220° C. to about 250° C.;
forming a semiconductor on the gate insulation layer;
forming a data line and a drain electrode on the semiconductor; and
forming a pixel electrode connected to the drain electrode.
2. The method of claim 1 , wherein the gate electrode comprises Copper.
3. The method of claim 2 , wherein the gate insulation layer comprises silicon nitride (SiN x ).
4. The method of claim 2 , wherein the forming of the gate insulation layer is performed at a temperature of about 220° C. to about 280° C.
5. The method of claim 1 , further comprising forming a passivation layer by supplying a gas which includes silicon at a temperature of less than or equal to about 280° C. after forming the data line and the drain electrode.
6. The method of claim 3 , wherein the resistance values of the gate electrode are between about 2.09 Ωm to about 221 Ωm.