High side semiconductor structure
A high side semiconductor structure is provided. The high side semiconductor structure includes a substrate, a first deep well, a second deep well, a first active element, a second active element and a doped well. The first deep well and the second deep well are formed in the substrate, wherein the first deep well and the second deep well have identical type of ion doping. The first active element and the second active element are respectively formed in the first deep well and the second deep well. The doped well is formed in the substrate and is disposed between the first deep well and the second deep well. The doped well, the first deep well and the second deep well are interspaced, and the type of ion doping of the first deep well and the second deep well is complementary with that of the doped well.
1. A high side semiconductor structure, comprising:
a substrate;
a first deep well and a second deep well formed in the substrate, wherein the first deep well and the second deep well have identical type of ion doping which is complementary with that of the substrate;
a first active element and a second active element respectively formed in the first deep well and the second deep well; and
a doped well formed in the substrate and between the first deep well and the second deep well, wherein the doped well, the first deep well and the second deep well are interspaced, and the type of ion doping of the first deep well and the second deep well are complementary with that of the doped well,
wherein the substrate between the first active element and the second active element is active-element-free, the first active element is one type of an N-type and P-type metal oxide semiconductor, and the second active element is another type of the N-type and P-type metal oxide semiconductor.
2. The semiconductor structure according to claim 1 , wherein a first gap region is disposed between the doped well and the first deep well, and a second gap region is disposed between the doped well and the second deep well.
3. The semiconductor structure according to claim 2 , wherein the width of the first gap region is substantially identical to that of the second gap region.
4. The semiconductor structure according to claim 2 , the width of the first gap region and that of the second gap region are both greater than 4 μm.
5. The semiconductor structure according to claim 1 , wherein a first gap region is disposed between the doped well and the first deep well, a second gap region is disposed between the doped well and the second deep well, and the doping concentrations of the first gap region and the second gap region are both lower than the doping concentration of the doped well.
6. The semiconductor structure according to claim 1 , wherein the substrate is a P-type substrate, each of the first deep well and the second deep well is an N-type deep well.
7. The semiconductor structure according to claim 6 , wherein the doped well is a P-type doped well.
8. The semiconductor structure according to claim 1 , wherein the substrate is an N-type substrate, and each of the first deep well and the second deep well is a P-type deep well.
9. The semiconductor structure according to claim 8 , wherein the doped well is an N-type doped well.
10. The semiconductor structure according to claim 1 , wherein the first active element is an N-type metal oxide semiconductor (NMOS), and the second active element is a P-type metal oxide semiconductor (PMOS).