Piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece
A piezoelectric vibrator includes a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions; a package that accommodates the piezoelectric vibrating reed; and a getter material that is formed along the longitudinal direction of the vibration arm portion in an inner portion of the package, wherein a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.
1. A piezoelectric vibrator comprising:
a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions;
a package that accommodates the piezoelectric vibrating reed; and
a getter material that is formed along a longitudinal direction of the vibration arm portion in an inner portion of the package,
wherein a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.
2. The piezoelectric vibrator according to claim 1 ,
wherein the width of the middle portion of the getter material is greater than that of the end portion of the getter portion.
3. The piezoelectric vibrator according to claim 1 ,
wherein the thickness of the middle portion of the getter material is greater than that of the end portion of the getter material.
4. The piezoelectric vibrator according to claim 1 ,
wherein the getter material is arranged at the outside of the pair of vibration arm portions in a width direction of the piezoelectric vibrating reed, and
wherein the distance from the vibration arm portions to the end portion of the getter material is greater than that from the vibration arm portions to the middle portion of the getter material.
5. A method of manufacturing a piezoelectric vibrator, which includes a tuning fork type piezoelectric vibrating reed that includes a pair of vibration arm portions, a package that accommodates the piezoelectric vibrating reed, and a getter material that is formed along a longitudinal direction of the vibration arm portions in an inner portion of the package, the method comprising:
a first gettering process comprising activating a middle portion of the getter material adjacent to center portions of a longitudinal direction of the vibration arm portions; and
a second gettering process comprising activating an end portion of the getter material,
such that a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.
6. The method of manufacturing the piezoelectric vibrator according to claim 5
wherein, in the second gettering process, both end portions of the getter material is activated so as to be axisymmetric to center lines of the longitudinal direction of the vibration arm portions.
7. An oscillator in which the piezoelectric vibrator according to claims 1 is electrically connected to an integrated circuit as an oscillating element.
8. An electronic equipment in which the piezoelectric vibrator according to claims 1 is electrically connected to a measurement portion.
9. A radio-controlled time piece in which the piezoelectric vibrator according to claims 1 is electrically connected to a filter portion.