Composite dielectric thin film, capacitor and field effect transistor using the same, and each fabrication method thereof
a composite dielectric thin film capable of high dielectric constant, low leakage current characteristics, and high dielectric breakdown voltage while being deposited at a room temperature, a capacitor and a field effect transistor (FET) using the same, and their fabrication methods. The composite dielectric thin film is deposited at a room temperature or less than 200° C. and comprises crystalline or amorphous insulating filler uniformly distributed within an amorphous dielectric matrix or within an amorphous and partially nanocrystalline dielectric matrix.
1. A method for fabricating a composite dielectric thin film, the method comprising:
preparing a ceramic target with a composition ratio of (dielectric) 1-x -(filler) x (x=0.3˜0.6), which comprises a first phase consisting of the dielectric and a second phase consisting of the filler, and the first and second phases being mixed with each other and
performing physical vapor deposition on the ceramic target at a room temperature or up to 200° C. to thereby obtain a partially nanocrystalline composite dielectric thin film on a substrate which is a plastic substrate, a glass substrate or a silicon substrate, with an insulating film formed thereon,
wherein the composite dielectric thin film comprises a dielectric matrix which is amorphous and amorphous, with partially nanocrystalline, and insulating fillers which are crystalline and uniformly distributed within the dielectric matrix
without performing further heat treatment, and wherein the dielectric contains Bi 1.5 Zn 1.0 Nb 1.5 O 7 (BZN).
2. The method of claim 1 , wherein the ceramic target is obtained by mixing, molding and thermally treating a mixture of dielectric synthesis powders and filler powders, and the dielectric synthesis powders are obtained by mixing and thermally treating powders which consist of the dielectric.
3. The method of claim 1 , wherein the physical vapor deposition process applies a sputtering method or a pulsed laser deposition (PLD) method.
4. The method of claim 1 , wherein the filler is one selected from the group consisting of MgO, Al 2 O 3 , SiO 2 and LaAlO 3 .
5. A method for fabricating a capacitor in which a first electrode, a dielectric layer and a second electrode are sequentially formed on a substrate, wherein the dielectric layer is formed by the method for fabricating a composite dielectric thin film of claim 1 .
6. A method for fabricating a field effect transistor having a gate insulating film, wherein the gate insulating film is formed by using the method for fabricating a composite dielectric thin film of claim 1 .