Semiconductor device and a method of manufacturing the same
A semiconductor device having redistribution interconnects in the WPP technology and improved reliability, wherein the redistribution interconnects have first patterns and second patterns which are electrically separated from each other within the plane of the semiconductor substrate, the first patterns electrically coupled to the multi-layer interconnects and the floating second patterns are coexistent within the plane of the semiconductor substrate, and the occupation ratio of the total of the first patterns and the second patterns within the plane of the semiconductor substrate, that is, the occupation ratio of the redistribution interconnects is 35 to 60%.
1. A semiconductor device comprising:
a multi-layer interconnect formed over a semiconductor substrate;
a first interconnect portion formed in an uppermost layer of the multi-layer interconnect;
a first insulating film formed over the first interconnect portion;
a second insulating film formed over the first insulating film;
a plurality of redistribution interconnects formed over the second insulating film;
a third insulating film formed over the second insulating film and the redistribution interconnects; and
a bump electrode formed over the third insulating film,
wherein the redistribution interconnects include a first pattern and a second pattern which is electrically separated from the first pattern,
wherein a first opening portion is formed in the first and second insulating films, and reaches at a part of the first interconnect portion,
wherein a second opening portion is formed in the third insulating film and reaches at the first pattern,
wherein the first pattern is electrically connected to the first interconnect portion via the first opening portion and is electrically connected to the bump electrode via the second opening portion,
wherein the second pattern is electrically separated from the multi-layer interconnect and the bump electrode, and
wherein a planar shape of the first pattern in the second opening portion is larger than a planar shape of the second pattern.
2. A semiconductor device according to the claim 1 ,
wherein the redistribution interconnects include a plurality of the first patterns and a plurality of the second patterns, and
wherein at least one of the second patterns is arranged between the first patterns.
3. A semiconductor device according to the claim 2 ,
wherein the plurality of the first patterns is arranged nearer to a periphery region of the semiconductor substrate than to a central portion of the semiconductor substrate, and
wherein the number of the second patterns arranged near the central portion of the semiconductor substrate is larger than the number of the second patterns arranged between the first patterns.
4. A semiconductor device according to the claim 1 ,
wherein a planar shape of the second pattern is circular or polygonal with all corners having a blunt angle.
5. A semiconductor device according to the claim 1 ,
wherein, in a plan view, the occupation ratio of the redistribution interconnects is 35% to 60%.
6. A semiconductor device according to the claim 1 ,
wherein the first insulating film includes a silicon oxide film and a silicon nitride film.
7. A semiconductor device according to the claim 1 ,
wherein the second insulating film includes a polyimide film.
8. A semiconductor device according to the claim 1 ,
wherein the redistribution interconnects include a copper film.
9. A semiconductor device according to the claim 8 ,
wherein the redistribution interconnects are formed by a plating method.