Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material
View Patent ↗A gas charge container includes a sample holder which holds a needle-shaped material, a deutrium gas supply portion which charges a deutrium gas into the needle-shaped material held by the sample holder, and a heating portion which heats the needle-shaped material held by the sample holder. The needle-shaped material is cooled by blocking the heat generated by the heating portion after the needle-shaped material is heated by the heating portion.
1. A gas charge container comprising:
a sample holder which holds a needle-shaped material;
a deutrium gas supply portion which charges a deutrium gas into the needle-shaped material held by the sample holder; and
a heating portion which heats the needle-shaped material held by the sample holder,
wherein the needle-shaped material is cooled by blocking a heat generated by the heating portion after the needle-shaped material is heated by the heating portion.
2. The gas charge container according to claim 1 ,
wherein the needle-shaped material is cooled by keeping away the heating portion from the sample holder after the needle-shaped material is heated by the heating portion.
3. The gas charge container according to claim 1 ,
wherein the heating portion is an optical heating portion, and the needle-shaped material is cooled by stopping the optical heating portion after the needle-shaped material is heated by the optical heating portion.
4. The gas charge container according to claim 1 ,
wherein the needle-shaped material held by the sample holder is cooled to −50° C. or lower within 10 seconds from a temperature after the heating by the heating portion.
5. An atom probe apparatus comprising:
the gas charge container according to claim 1 ;
an analysis container which performs atom probe measurement of the needle-shaped material held by the sample holder; and
a conveyance portion which conveys the sample holder from the gas charge container to an analysis position within the analysis container.
6. An atom probe apparatus comprising:
the gas charge container according to claim 1 ;
an analysis container which performs atom probe measurement of the needle-shaped material held by the sample holder; and
a valve which connects the gas charge container and the analysis container together.
7. A method for analyzing a hydrogen position in a material using an atom probe apparatus, the method comprising the steps of:
cooling the sample holder holding the needle-shaped material as the sample to −100° C. or lower in an atmosphere including the deutrium gas supplied from the deutrium gas supply portion within the gas charge container according to claim 1 ;
heating the needle-shaped material to a temperature of 100° C. or higher and maintaining the needle-shaped material at the temperature by the heating portion;
cooling the needle-shaped material to −50° C. or lower within 10 seconds by the cooling portion;
conveying the sample holder in a vacuum atmosphere from an inside of the gas charge container to the analysis container using the conveyance portion in a state where the needle-shaped material is kept at −50° C. or lower after the inside of the gas charge container is evacuated, and installing the sample holder at an analysis position within the analysis container; and
performing atom probe measurement of a deutrium in the needle-shaped material.