Method for manufacturing piezoelectric device
In a piezoelectric device and a method of manufacturing thereof, after an ion implanted portion is formed in a piezoelectric single crystal substrate by implantation of hydrogen ions, an interlayer of a metal is formed on a rear surface of the piezoelectric single crystal substrate. In addition, a support member is bonded to the piezoelectric single crystal substrate with the interlayer interposed therebetween. A composite piezoelectric body in which the ion implanted portion is formed is heated at about 450° C. to about 700° C. to oxidize the metal of the interlayer so as to decrease the conductivity thereof. Accordingly, the conductivity of the interlayer is decreased, so that a piezoelectric device having excellent resonance characteristics is provided.
1. A method for manufacturing a piezoelectric device comprising:
an ion implantation step of implanting an ionized element in a piezoelectric substrate to form a portion therein in which the ionized element implanted in the piezoelectric substrate has a peak concentration;
an interlayer formation step of forming an interlayer including a metal on at least one of the piezoelectric substrate or a support member which supports the piezoelectric substrate;
a bonding step of bonding the piezoelectric substrate and the support member with the interlayer interposed therebetween;
a separation step of separating a piezoelectric thin film by heating the piezoelectric substrate using the portion in which the ionized element implanted therein has a peak concentration as a separation surface; and
a heat treatment step of oxidizing or nitriding the interlayer by heating.
2. The method for manufacturing a piezoelectric device according to claim 1 , wherein in the heat treatment step, heating is performed at about 450° C. to about 700° C.
3. The method for manufacturing a piezoelectric device according to claim 1 , wherein in the heat treatment step, heating is performed at a Curie temperature or less of a material of the piezoelectric thin film.