Method of manufacturing a ferroelectric-capacitor memory device including recovery annealing
In a manufacturing method of a semiconductor device, a first insulating film covering a ferroelectric capacitor is formed, and a first opening that has a relatively large diameter and reaches an electrode of the ferroelectric capacitor is formed in the first insulating film, and then recovery annealing of the ferroelectric capacitor is performed, and thereby, a path for oxygen can be secured in performing the recovery annealing, and the sufficient recovery annealing can be performed without causing problems during a manufacturing process.
1. A manufacturing method of a semiconductor device comprising:
forming a ferroelectric capacitor above a semiconductor substrate;
forming a first insulating film covering the ferroelectric capacitor;
forming a contact plug in the first insulating film;
forming a second insulating film on the contact plug and the first insulating film;
forming a first opening reaching an electrode of the ferroelectric capacitor in the first insulating film and the second insulating film;
performing recovery annealing of the ferroelectric capacitor after forming the first opening;
forming a conductive plug in the first opening after performing the recovery annealing;
forming a third insulating film covering the second insulating film and the conductive plug;
forming a second opening smaller than the first opening in the third insulating film, the second opening reaching the conductive plug; and
forming a wiring connected to the conductive plug electrically via the second opening on the third insulating film.
2. The manufacturing method of a semiconductor device according to claim 1 , wherein the first opening reaches at least a top electrode of the ferroelectric capacitor.
3. The manufacturing method of a semiconductor device according to claim 2 , wherein an area at an uppermost portion of the first opening is equal to or more than 0.9 times as large as an area of an uppermost surface of the top electrode.
4. The manufacturing method of a semiconductor device according to claim 1 , wherein the wiring contacts with the conductive plug.
5. The manufacturing method of a semiconductor device according to claim 1 , further comprising,
between forming the second opening and forming the wiring, forming a second conductive plug in the second opening.
6. The manufacturing method of a semiconductor device according to claim 1 , wherein the ferroelectric capacitor has a planar-type structure.
7. The manufacturing method of a semiconductor device according to claim 1 , wherein the ferroelectric capacitor has a stack-type structure.
8. The manufacturing method of a semiconductor device according to claim 7 , further comprising,
between forming the ferroelectric capacitor and forming the first insulating film, forming a sidewall insulating film on a lateral side of the ferroelectric capacitor.
9. The manufacturing method of a semiconductor device according to claim 1 , wherein forming the wiring comprises:
forming a material for the wiring over the third insulating film; and
patterning the material using the third insulating film as an etching stopper film.
10. The manufacturing method of a semiconductor device according to claim 9 , wherein the etching stopper film is an oxide film formed by a CVD method.
11. The manufacturing method of a semiconductor device according to claim 9 , wherein a thickness of the etching stopper film is set to be 20 nm to 100 nm.
12. The manufacturing method of a semiconductor device according to claim 1 , wherein the third insulating film is a barrier film preventing moisture from being permeated.
13. The manufacturing method of a semiconductor device according to claim 12 , wherein the barrier film is a film containing nitrogen formed by a plasma CVD method.
14. The manufacturing method of a semiconductor device according to claim 12 , wherein a thickness of the barrier film is set to be 20 nm to 100 nm.
15. The manufacturing method of a semiconductor device according to claim 1 , wherein the third insulating film is a barrier film preventing moisture and hydrogen from being permeated.
16. The manufacturing method of a semiconductor device according to claim 15 , wherein the barrier film is a metal oxide film.
17. The manufacturing method of a semiconductor device according to claim 15 , wherein a thickness of the barrier film is set to be 20 nm to 50 nm.
18. The manufacturing method of a semiconductor device according to claim 1 , wherein,
forming the third insulating film comprises:
forming a barrier film preventing moisture and hydrogen from being permeated; and
forming a silicon oxide film over the barrier film, and
forming the wiring comprises:
forming a material for the wiring over the silicon oxide film; and
patterning the material using the silicon oxide film as an etching stopper film.
19. The manufacturing method of a semiconductor device according to claim 18 , wherein
the barrier film is a metal oxide film, and
the silicon oxide film is formed by a CVD method.
20. The manufacturing method of a semiconductor device according to claim 1 , further comprising:
forming a gate electrode on the semiconductor substrate;
forming an impurity diffusion layer in the semiconductor substrate; and
forming a forth insulating film on the gate electrode and the impurity diffusion layer before forming the ferroelectric capacitor, wherein
the contact plug is formed in the first insulating film and forth insulating film, and
the contact plug is connected to the impurity diffusion layer.