Semiconductor device and production method therefor
An object of the invention is to provide a method for producing a conductive member having low electrical resistance, and the conductive member is obtained using a low-cost stable conductive material composition that does not contain an adhesive. A method for producing a semiconductor device in which silver or silver oxide provided on a surface of a base and silver or silver oxide provided on a surface of a semiconductor element are bonded, includes the steps of arranging a semiconductor element on a base such that silver or silver oxide provided on a surface of the semiconductor element is in contact with silver or silver oxide provided on a surface of the base, and bonding the semiconductor element and the base by applying heat having a temperature of 200 to 900° C. to the semiconductor device and the base.
1. A method for producing a semiconductor device, the method comprising:
for silver oxide formed by silver sputtering, silver vapor deposition or silver plating and provided on a surface of a base, and silver or silver oxide formed by silver sputtering, silver vapor deposition or silver plating and provided on a surface of a semiconductor element,
arranging the semiconductor element on the base such that said silver or silver oxide provided on the surface of the semiconductor element directly contacts said silver oxide provided on the surface of the base, and
bonding the semiconductor element and the base by applying heat having a temperature of 200 to 900° C. to the semiconductor element and the base.
2. The method for producing a semiconductor device according to claim 1 , further comprising the step of applying an organic solvent or water between the silver or silver oxide provided on the surface of the semiconductor element and the silver oxide provided on the surface of the base.
3. The method for producing a semiconductor device according to claim 2 , wherein the organic solvent has a boiling point of 100 to 300° C.
4. The method for producing a semiconductor device according to claim 2 , wherein the organic solvent is at least one member selected from the group consisting of 2-ethyl-1,3-hexanediol, glycerol, ethylene glycol, diethylene glycol, diethylene glycol monobutyl ether, diethylene glycol monoethyl ether, and triethylene glycol.
5. The method for producing a semiconductor device according to claim 1 , wherein the step of bonding is performed in air or in an oxygen environment.
6. The method for producing a semiconductor device according to claim 1 , wherein the semiconductor element is a light emitting semiconductor element.
7. The method for producing a semiconductor device according to claim 6 , wherein in the semiconductor element a semiconductor layer is disposed on a translucent inorganic substrate, the translucent inorganic substrate is provided with first silver on the side opposite the semiconductor layer and furnished with a buffering member bonded with the first silver, and the silver or silver oxide is provided on a surface of the buffering member.
8. The method for producing a semiconductor device according to claim 1 , wherein, in said arranging step
the semiconductor element and the base are arranged such that said silver or silver oxide provided on the surface of the semiconductor element directly contacts said silver oxide provided on the surface of the base, such that said silver or silver oxide provided on the surface of the semiconductor element touches said silver oxide provided on the surface of the base.
9. The method for producing a semiconductor device according to claim 1 , wherein, in said arranging step, the semiconductor element and the base are arranged such that, at the interface between
said silver or silver oxide provided on the surface of the semiconductor element,
and
said silver oxide provided on the surface of the base, said silver or silver oxide provided on the surface of the semiconductor element directly contacts said silver oxide provided on the surface of the base.
10. The method for producing a semiconductor device according to claim 1 ,
wherein said bonding step is performed by applying heat having a temperature of 200 to 400° C. to the semiconductor element and the base.
11. The method for producing a semiconductor device according to claim 2 , wherein
said organic solvent or water is applied to the base before the semiconductor element is mounted on the base,
thereafter, the semiconductor element is mounted on the base, said mounted semiconductor element being kept positioned on the base due to the surface tension of said organic solvent or water, until said bonding step is performed, and
said organic solvent or water is volatilized during the bonding step.
12. A method for producing a semiconductor device, the method comprising:
for silver or silver oxide formed by silver sputtering, silver vapor deposition or silver plating and provided on a surface of a base, and silver oxide formed by silver sputtering, silver vapor deposition or silver plating and provided on a surface of a semiconductor element,
arranging the semiconductor element on the base such that said silver oxide provided on the surface of the semiconductor element directly contacts said silver or silver oxide provided on the surface of the base, and
bonding the semiconductor element and the base by applying heat having a temperature of 200 to 900° C. to the semiconductor element and the base.
13. The method for producing a semiconductor device according to claim 12 , further comprising the step of applying an organic solvent or water between the silver oxide provided on the surface of the semiconductor element and the silver or silver oxide provided on the surface of the base.
14. The method for producing a semiconductor device according to claim 13 , wherein the organic solvent has a boiling point of 100 to 300° C.
15. The method for producing a semiconductor device according to claim 13 , wherein the organic solvent is at least one member selected from the group consisting of 2-ethyl-1,3-hexanediol, glycerol, ethylene glycol, diethylene glycol, diethylene glycol monobutyl ether, diethylene glycol monoethyl ether, and triethylene glycol.
16. The method for producing a semiconductor device according to claim 12 , wherein the step of bonding is performed in air or in an oxygen environment.
17. The method for producing a semiconductor device according to claim 12 , wherein the semiconductor element is a light emitting semiconductor element.
18. The method for producing a semiconductor device according to claim 17 , wherein in the semiconductor element a semiconductor layer is disposed on a translucent inorganic substrate, the translucent inorganic substrate is provided with first silver on the side opposite the semiconductor layer and furnished with a buffering member bonded with the first silver, and the silver oxide is provided on a surface of the buffering member.
19. The method for producing a semiconductor device according to claim 12 , wherein, in said arranging step
the semiconductor element and the base are arranged such that said silver oxide provided on the surface of the semiconductor element directly contacts said silver or silver oxide provided on the surface of the base, such that said silver oxide provided on the surface of the semiconductor element touches said silver or silver oxide provided on the surface of the base.
20. The method for producing a semiconductor device according to claim 12 , wherein, in said arranging step, the semiconductor element and the base are arranged such that, at the interface between
said silver oxide provided on the surface of the semiconductor element, and
said silver or silver oxide provided on the surface of the base, said silver oxide provided on the surface of the semiconductor element directly contacts said silver or silver oxide provided on the surface of the base.
21. The method for producing a semiconductor device according to claim 12 ,
wherein said bonding step is performed by applying heat having a temperature of 200 to 400° C. to the semiconductor element and the base.
22. The method for producing a semiconductor device according to claim 13 , wherein
said organic solvent or water is applied to the base before the semiconductor element is mounted on the base,
thereafter, the semiconductor element is mounted on the base, said mounted semiconductor element being kept positioned on the base due to the surface tension of said organic solvent or water, until said bonding step is performed, and
said organic solvent or water is volatilized during the bonding step.