Germanium photodetector and method of fabricating the same
Provided is a germanium photodetector having a germanium epitaxial layer formed without using a buffer layer and a method of fabricating the same. In the method, an amorphous germanium layer is formed on a substrate. The amorphous germanium layer is heated up to a high temperature to form a crystallized germanium layer. A germanium epitaxial layer is formed on the crystallized germanium layer.
1. A method of fabricating a germanium photodetector, the method comprising:
forming an amorphous germanium layer on a silicon substrate at a first temperature;
crystallizing the amorphous germanium layer while heating from the first temperature to a second temperature; and
forming a germanium epitaxial layer on the crystallized germanium layer,
wherein impurity atoms are doped in situ during the forming of the amorphous germanium layer.
2. The method of claim 1 , wherein the forming of the germanium epitaxial layer on the crystallized germanium layer is performed at the second temperature, or during the heating from the first temperature to the second temperature.
3. The method of claim 1 , wherein the first temperature is about 300° C. to about 500° C.
4. The method of claim 3 , wherein the second temperature is about 600° C. to about 700° C.
5. The method of claim 1 , wherein the forming of the amorphous germanium layer and the germanium epitaxial layer is performed in a low vacuum of about 1 torr to about 300 torr.
6. The method of claim 1 , wherein the amorphous germanium layer is formed to a thickness of about 300 nm or less.
7. The method of claim 1 , wherein the amorphous germanium layer and the crystallized germanium layer are substantially free from silicon atoms.
8. The method of claim 1 , wherein the germanium epitaxial layer is substantially free from silicon atoms.
9. A method of fabricating a germanium photodetector, the method comprising:
forming an amorphous germanium layer on a silicon substrate at a first temperature;
crystallizing the amorphous germanium layer while heating from the first temperature to a second temperature; and
forming a germanium epitaxial layer on the crystallized germanium layer,
wherein forming the germanium epitaxial layer is an annealing-free process.
10. A method of fabricating a germanium photodetector, the method comprising:
forming an amorphous germanium layer on a silicon substrate at a first temperature; and
forming a germanium epitaxial layer on the amorphous germanium layer at a second temperature, or during the heating from the first temperature to the second temperature;
wherein the amorphous germanium layer is crystallized during the forming of the germanium epitaxial layer, and
wherein forming the germanium epitaxial layer is an annealing-free process.
11. The method of claim 10 , wherein the first temperature is about 300° C. to about 500° C.
12. The method of claim 10 , wherein the second temperature is about 600° C. to about 700° C.
13. The method of claim 10 , wherein the forming of the amorphous germanium layer and the germanium epitaxial layer is performed in a low vacuum of about 1 torr to about 300 torr.
14. The method of claim 10 , wherein the amorphous germanium layer is formed to a thickness of about 300 nm or less.
15. The method of claim 10 , wherein the amorphous germanium layer and the crystallized germanium layer are substantially free from silicon atoms.
16. The method of claim 10 , wherein the germanium epitaxial layer is substantially free from silicon atoms.