Method for fabricating semiconductor nano circular ring
The present invention discloses a method for fabricating a semiconductor nano circular ring. In the method, firstly, a positive photoresist is coated on a semiconductor substrate, then the photoresist is exposed by using a circular mask with a micrometer-sized diameter to obtain the circular ring-shaped photoresist, based on the poisson diffraction principle. Then, a plasma etching is performed on the substrate under a protection of the circular ring-shaped photoresist to form a circular ring-shaped structure with a nano-sized wall thickness on a surface of the substrate. The embodiment of present invention fabricates a nano-sized circular ring-shaped structure by using a micrometer-sized lithography equipment and a micrometer-sized circular mask, and overcomes the dependence on advanced technologies, so as to effectively reduce the fabrication cost of the circular ring-shaped nano structure.
1. A method for fabricating a semiconductor nano circular ring, comprising:
1) cleaning a semiconductor substrate and pre-baking the substrate;
2) spin-coating a positive photoresist on the substrate;
3) exposing the photoresist under a protection of a mask, wherein a pattern region of the mask is a circle with a micrometer-sized diameter;
4) developing an exposed photoresist to form a circular ring-shaped photoresist on the substrate, and then post-baking the substrate;
5) performing a plasma etching on the substrate under protection of the circular ring-shaped photoresist;
6) removing remained photoresist and performing a cleaning to form a circular ring-shaped structure with a nano-sized wall thickness on a surface of the substrate.
2. The method according to claim 1 , characterized in that, in the step 1), a material of the substrate is Si, Ge, GaAs or GaN.
3. The method according to claim 1 , characterized in that, in the step 2), the positive photoresist is RZJ 304-25, AR-P 3100, AR-P 3200, AR-P 3500 or AR-P 5900/4.
4. The method according to claim 1 , characterized in that, in the step 2), the positive photoresist spin-coated has a thickness of 300 namometers-4 micrometers.
5. The method according to claim 4 , characterized in that, in the step 2), the positive photoresist spin-coated has a thickness of 1 micrometers-3 micrometers.
6. The method according to claim 1 , characterized in that, in the step 4), an ultraviolet exposure is performed by a ultraviolet lithography equipment, and the pattern region of the mask is a circle with a diameter in the range of 1μ<d<2 μm.
7. The method according to claim 6 , characterized in that, an ultraviolet light in the ultraviolet exposure has a wavelength of 365 nm, and the pattern region of the mask is a circle with a diameter of 1.5 μm.