Bipolar transistor and method for manufacturing the same
A method for manufacturing a bipolar transistor includes forming a first epitaxial layer on a semiconductor substrate, forming a second epitaxial layer on the first epitaxial layer, forming an oxide layer on the second epitaxial layer, etching the oxide layer to form an opening in which the second epitaxial layer is exposed, and forming a third epitaxial layer in the opening. The first and third epitaxial layers have a first-type conductivity, and the second epitaxial layer has a second-type conductivity.
1. A method for manufacturing a bipolar transistor, comprising:
forming a first epitaxial layer on a semiconductor substrate, the first epitaxial layer having a first-type conductivity;
forming a second epitaxial layer on the first epitaxial layer, the second epitaxial layer having a second-type conductivity;
forming an oxide layer on the second epitaxial layer;
partially etching the oxide layer to form an opening in which the second epitaxial layer is exposed; and
forming a third epitaxial layer in the opening, the third epitaxial layer having the first-type conductivity.
2. The method according to claim 1 , further comprising:
implanting and diffusing ions in the semiconductor substrate to form a buried layer before forming the first epitaxial layer, the buried layer having the first-type conductivity,
wherein the first epitaxial layer is formed on the buried layer.
3. The method according to claim 2 , wherein the implanting and diffusing includes implanting and diffusing N-type ions.
4. The method according to claim 3 , wherein the implanting and diffusing includes implanting and diffusing antimony ions.
5. The method according to claim 1 , wherein the forming of the first epitaxial layer includes forming an N-type epitaxial layer.
6. The method according to claim 1 , wherein the forming of the second epitaxial layer includes forming a P-type epitaxial layer.
7. The method according to claim 1 , wherein the forming of the third epitaxial layer includes forming an N-type epitaxial layer.
8. The method according to claim 1 , further including providing the semiconductor substrate as a silicon substrate.
9. The method according to claim 1 , wherein the forming of the first epitaxial layer includes forming the first epitaxial layer as a single crystal silicon layer having a thickness selected from a range of about 4 μm to about 5 μm.
10. The method according to claim 1 , wherein the forming of the second epitaxial layer includes forming the second epitaxial layer as a single crystal silicon layer having a thickness selected from a range of about 1 μm to about 3 μm.
11. The method according to claim 1 , wherein the forming of the third epitaxial layer includes forming the third epitaxial layer as a single crystal silicon layer having a thickness selected from a range of about 2 μm to about 3 μm.
12. The method according to claim 1 , wherein the forming of the oxide layer includes forming the oxide layer as a silicon-containing oxide layer having a thickness selected from a range of about 2500 Å to about 3500 Å.
13. The method according to claim 1 , wherein the forming of the third epitaxial layer includes forming the third epitaxial layer with a thickness substantially the same as a thickness of the oxide layer.
14. The method according to claim 1 , wherein the forming of the oxide layer includes forming the oxide layer by a chemical vapor deposition method or a thermal oxide method.
15. The method according to claim 1 , wherein the forming of the third epitaxial layer includes thrilling the third epitaxial layer by a selective epitaxial method.
16. The method according to claim 1 , wherein forming the third epitaxial layer includes:
forming an epitaxial layer in the opening and over the oxide layer, and
removing a portion of the epitaxial layer formed over the oxide layer by a planarization process.
17. The method according to claim 2 , wherein the implanting and diffusing includes implanting and diffusing P-type ions.
18. The method according to claim 1 , wherein the forming of the first epitaxial layer includes forming a P-type epitaxial layer.
19. The method according to claim 1 , wherein the forming of the second epitaxial layer includes forming an N-type epitaxial layer.
20. The method according to claim 1 , wherein the forming of the epitaxial layer includes forming a P-type epitaxial layer.
21. A bipolar transistor, comprising:
a semiconductor substrate;
a first epitaxial layer formed on the semiconductor substrate, the first epitaxial layer having a first-type conductivity;
a second epitaxial layer formed on the first epitaxial layer, the second epitaxial layer having a second-type conductivity, the second-type conductivity being different than the first-type conductivity;
an oxide layer formed on the second epitaxial layer, the oxide layer having an opening exposing a portion of the second epitaxial layer; and
a third epitaxial layer formed in the opening, the third epitaxial layer having the first-type conductivity.
22. The bipolar transistor according to claim 21 , further comprising:
a buried layer formed in the semiconductor substrate, the buried layer having the first-type conductivity,
wherein the first epitaxial layer is formed on the buried layer.