Composite substrate manufacturing method and composite substrate
According to a composite substrate manufacturing method of the present invention, (a) a piezoelectric substrate having minute asperities formed in a rear surface thereof, and a support substrate having a smaller thermal expansion coefficient than the piezoelectric substrate are prepared, (b) a filler is applied to the rear surface 11 a to fill the minute asperities, thereby forming a filling layer, (c) a surface of the filling layer is mirror-polished to such an extent that an arithmetic mean roughness Ra of the surface of the filling layer is smaller than an arithmetic mean roughness Ra of the rear surface 11 a in a state of above (a), and (d) the surface of the filling layer and a surface of the support substrate are bonded to each other with an adhesive layer interposed therebetween, thereby forming a composite substrate.
1. A composite substrate comprising:
a piezoelectric substrate having asperities formed in one surface thereof;
a support substrate having a smaller thermal expansion coefficient than the piezoelectric substrate;
a filling layer formed to fill the asperities and having a joined surface on the side oppositely away from the piezoelectric substrate, the joined surface having an arithmetic mean roughness Ra smaller than an arithmetic mean roughness Ra of the one surface of the piezoelectric substrate; and
an adhesive layer bonding the joined surface and the support substrate to each other,
wherein a first boundary exists between the adhesive layer and the filling layer, and no bubbles are present at the first boundary between the adhesive layer and the filling layer, inside the adhesive layer, and at a second boundary between the adhesive layer and the support substrate.
2. The composite substrate according to claim 1 , wherein the one surface of the piezoelectric substrate is partly exposed to the joined surface.
3. The composite substrate according to claim 1 , wherein the adhesive layer is made of the same material as that of the filling layer.
4. A method for manufacturing the composite substrate according to claim 1 , comprising the steps of:
(a) preparing the piezoelectric substrate having asperities formed in one surface thereof, and the support substrate having a smaller thermal expansion coefficient than the piezoelectric substrate;
(b) applying a filler to the one surface to fill the asperities, thereby forming the filling layer;
(c) mirror-polishing a surface of the filling layer to such an extent that an arithmetic mean roughness Ra of the surface of the filling layer is smaller than the arithmetic mean roughness Ra of the one surface in the step (a); and
(d) bonding the surface of the filling layer and a surface of the support substrate to each other with the adhesive layer interposed therebetween, thereby forming the composite substrate.
5. The composite substrate manufacturing method according to claim 4 , wherein, in the step (c), the surface of the filling layer is mirror-polished by using slurry which exhibits a lower polishing rate for the piezoelectric substrate than that for the filling layer.
6. The composite substrate manufacturing method according to claim 4 , wherein, in the step (c), the minor-polishing is performed until the one surface of the piezoelectric substrate is partly exposed.
7. The composite substrate manufacturing method according to claim 4 , wherein, in the step (d), the bonding is performed with interposition of the adhesive layer, which is made of the same material as that of the filling layer formed in the step (b).