Semiconductor device having a through-substrate via
Semiconductor devices are described that have a through-substrate via formed therein. In one or more implementations, the semiconductor devices include a top wafer and a bottom wafer bonded together with a patterned adhesive material. The top wafer and the bottom wafer include one or more integrated circuits formed therein. The integrated circuits are connected to one or more conductive layers deployed over the surfaces of the top and bottom wafers. A via is formed through the top wafer and the patterned adhesive material so that an electrical interconnection can be formed between the integrated circuits formed in the top wafer and the integrated circuits formed in the bottom wafer. The via includes a conductive material that furnishes the electrical interconnection between the top and bottom wafers.
1. A semiconductor device comprising:
a top substrate having a first surface and a second surface, the top substrate including a conductive layer disposed over the second surface;
a bottom substrate having a first surface, an integrated circuit disposed proximate to the first surface, and a conductive pad disposed in the first surface, the integrated circuit electrically coupled to the conductive pad;
a patterned adhesive material disposed between the first surface of the top substrate and the first surface of the bottom substrate, the patterned adhesive material configured to bond the bottom substrate to the top substrate, the patterned adhesive material comprising a non-discrete non-continuous material configured to allow for expansion when the patterned adhesive material is pressed vertically; and
a via formed through the top substrate and the patterned adhesive material, the via including a conductive material configured to electrically couple the conductive pad of the bottom substrate to the conductive layer of the top substrate.
2. The semiconductor device as recited in claim 1 , wherein the patterned adhesive material comprises a patterned dielectric.
3. The semiconductor device as recited in claim 2 , wherein the patterned dielectric comprises benzocyclobutene (BCB).
4. The semiconductor device as recited in claim 1 , wherein the via further includes an insulating liner configured to electrically isolate the top wafer and the patterned adhesive material from the conductive material disposed in the via.
5. The semiconductor device as recited in claim 4 , wherein the insulating liner extends at least substantially through the thickness of the top wafer and at least substantially through the thickness of the patterned adhesive material.
6. The semiconductor device as recited in claim 5 , wherein the insulating liner comprises silicon dioxide.
7. The semiconductor device as recited in claim 6 , wherein the conductive material comprises a seed layer of copper formed over the insulating liner.
8. The semiconductor device as recited in claim 1 , wherein the conductive material comprises copper.
9. The semiconductor device as recited in claim 1 , wherein the conductive material extends from the via to form a redistribution structure proximate to the second surface of the top substrate.
10. The semiconductor device as recited in claim 1 , further comprising a solder bump assembly electrically coupled to the conductive layer.