Ultrasonic probe and ultrasonic diagnostic apparatus using the same
An ultrasonic probe is disclosed which includes a cMUT chip having a plurality of vibration elements whose electromechanical coupling coefficient or sensitivity is changed according to a bias voltage and transmitting and receiving ultrasonic waves, an acoustic lens arranged above the cMUT chip, and a backing layer arranged below the cMUT chip. An electric leakage preventing unit is provided at the ultrasonic wave transmission/reception surface side of the acoustic lens or between the acoustic lens and the cMUT chip. The electric leakage preventing unit can be, for example, an insulating layer such as a ground layer. Such a structure makes it is possible to provide an ultrasonic probe capable of preventing electric leakage from the ultrasonic probe to an object to be examined so as to improve the electric safety and an ultrasonic diagnostic apparatus using the probe.
1. An ultrasonic probe comprising:
a capacitive micro-machined ultrasonic transducer (cMUT) chip for transmitting/receiving ultrasonic waves, and including a plurality of vibration elements having an electromechanical coupling coefficient or sensitivity which varies in accordance with bias voltage;
an acoustic lens disposed on the ultrasonic wave emitting side of the cMUT chip;
an insulating layer disposed between the acoustic lens and an upper electrode of the cMUT chip to which a drive signal applied; and
a ground layer disposed between the acoustic lens and the insulation layer.
2. The ultrasonic probe according to claim 1 , wherein the insulation layer is a part of the cMUT chip, and is disposed on the bias voltage applied electrode.
3. The ultrasonic probe according to claim 2 , wherein the insulation layer is a film body.
4. The ultrasonic probe according to claim 1 , wherein the insulation layer comprises two layers of insulation material and a ground layer disposed between the two layers of insulation material.
5. The ultrasonic probe according to claim 1 , wherein the insulation layer is a paraxylene film.
6. The ultrasonic probe according to claim 1 , wherein the ground layer is a Cu film.