Plasmonic in-cell polarizer
A plasmonic polarizer and a method for fabricating the plasmonic polarizer are provided. The method deposits alternating layers of non-metallic film and metal, forming a stack. A hard mask is formed overlying the stack. The hard mask comprises structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2). The stack is etched through openings in the hard mask to form pillar stacks of alternating non-metallic and metal layers having the dimensions of the hard mask structures. Then, the hard mask structures are removed. In one aspect, subsequent to removing the hard mask structures, the spaces between the pillar stacks are filled with a dielectric material.
1. A plasmonic polarizer comprising;
a three-dimensional (3D) array of metallic nanostructures comprising:
a plurality of plasmonic layers, where each layer includes a pattern of metallic nanostructures, the nanostructures having dimensions and periods between adjacent nanostructures less than a first length, where the first length is equal to (a first wavelength of light/2); and,
a plurality of non-metallic film layers, with at least one non-metallic film layer interposed between adjacent plasmonic layers.
2. The polarizer of claim 1 wherein vertically adjacent nanostructures, in adjacent plasmonic layers, form pillar structures, and wherein the vertically adjacent nanostructures in the pillar structures have a pitch (SP L ) less than the first length.
3. The polarizer of claim 2 wherein the pitch between the vertically adjacent nanostructures in the pillars is selected from a group consisting of uniform and non-uniform.
4. The polarizer of claim 1 wherein the nanostructures all have common dimensions.
5. The polarizer of claim 1 wherein the nanostructures in each plasmonic layer pattern have uncommon dimensions.
6. The polarizer of claim 1 wherein the periods between nanostructures in each plasmonic layer comprise a first space (S a ) in a first direction in a horizontal plane and a second space (S b ) in a second direction in the horizontal plane, orthogonal to the first direction, and wherein the first spaces are a first uniform value and the second spaces are a second uniform value.
7. The polarizer of claim 1 wherein the periods between nanostructures in each plasmonic layer comprise a first space (S a ) in a first direction in a horizontal plane and a second space (S b ) in a second direction in the horizontal plane, orthogonal to the first direction, and wherein the first spaces have non-uniform values and the second spaces have non-uniform values.
8. The polarizer of claim 1 wherein the nanostructures have a length (D a ) in a first direction in a horizontal plane, a width (D b ) in a second direction in the horizontal plane, orthogonal to the first direction, and a thickness (t) in a vertical plane orthogonal to the horizontal plane, wherein D a is greater than D b , and wherein D a is greater than t.
9. The polarizer of claim 1 wherein the non-metallic film layer interposed between at least one set of adjacent plasmonic layers is a first plurality of overlying non-metallic films comprised of a corresponding first plurality of non-metallic film materials.
10. The polarizer of claim 1 further comprising:
a first antireflective coating (ARC) film underlying the 3D array of nanostructures; and,
a second ARC film overlying the 3D array of nanostructures.
11. The polarizer of claim 1 wherein each non-metallic film layer is comprised of a material selected from a group consisting of a material transparent in a first range of light wavelengths and a material absorptive in the first range of light wavelengths.
12. The polarizer of claim 1 wherein the 3D array of metallic nanostructures further comprises a dielectric material filling spaces in the 3D array of metallic nanostructures between pillars of vertically adjacent nanostructures.
13. The polarizer of claim 1 wherein the polarizer is an in-cell polarizer further comprising:
a first transparent substrate overlying the 3D array of metallic nanostructures;
a second transparent substrate underlying the 3D array of metallic nanostructures; and,
a display control mechanism selected from a group consisting of a liquid crystal (LC) layer interposed between a transparent substrate and the 3D array of metallic nanostructures, a color filter interposed between a transparent substrate and the 3D array of metallic nanostructures, and both the color filter and LC layer interposed between transparent substrates and the 3D array of metallic nanostructures.
14. A method for fabricating a plasmonic polarizer, the method comprising;
depositing alternating layers of non-metallic film and metal, forming a stack;
forming a hard mask overlying the stack, the hard mask comprising structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2);
etching the stack through openings in the hard mask to form pillar stacks of alternating non-metallic film and metal layers having the dimensions of the hard mask structures; and,
removing the hard mask structures.
15. The method of claim 14 further comprising:
subsequent to removing the hard mask structures, filling spaces between the pillar stacks with a dielectric material.
16. The method of claim 14 wherein depositing alternating layers of non-metallic film and metal includes depositing non-metallic films each having a thickness (SP L ) less than the first length, and metal films each having a thickness (t) less than the first length.
17. The method of claim 14 wherein depositing alternating layers of non-metallic film and metal includes depositing non-metallic films with each with a thickness (SP L ) selected from a group consisting of uniform and non-uniform, and metal films each with a thickness (t) selected from the group consisting of uniform and non-uniform.
18. The method of claim 14 wherein forming the hard mask includes forming hard mask structures all having common dimensions.
19. The method of claim 14 wherein forming the hard mask includes forming hard mask structures having uncommon dimensions.
20. The method of claim 14 wherein forming the hard mask includes forming periods between hard mask structures comprising a first space (S a ) in a first direction and a second space (S b ) in a second direction, orthogonal to the first direction, and wherein the first spaces are a first uniform value and the second spaces are a second uniform value.
21. The method of claim 14 wherein forming the hard mask includes forming periods between hard mask structures comprising a first space (S a ) in a first direction and a second space (S b ) in a second direction, orthogonal to the first direction, and wherein the first spaces have non-uniform values and the second spaces have non-uniform values.
22. The method of claim 14 wherein forming the hard mask includes forming hard mask structures having a length (D a ) in a first direction and a width (D b ) in a second direction, orthogonal to the first direction, wherein D a is greater than D b .
23. The method of claim 14 wherein depositing alternating layers of non-metallic film and metal includes depositing at least one non-metallic film layer comprising a first plurality of overlying non-metallic films made from a corresponding first plurality of non-metallic film materials.
24. The method of claim 14 further comprising:
forming a first antireflective coating (ARC) film underlying the pillar stacks; and,
forming a second ARC film overlying the pillar stacks.
25. The method of claim 14 wherein depositing alternating layers of non-metallic film and metal includes depositing non-metallic film layers comprised of a material selected from a group consisting of a material transparent in a first range of light wavelengths and a material absorptive in the first range of light wavelengths.
26. A display with a plasmonic in-cell polarizer comprising;
a waveguide having a horizontal top surface to supply visible spectrum light in a vertical direction, orthogonal to the horizontal top surface;
a transparent bottom substrate overlying the waveguide;
a plasmonic in-cell polarizer overlying the waveguide top surface,
the polarizer comprising:
a three-dimensional (3D) array of metallic nanostructures overlying the bottom substrate, the 3D array of metallic nanostructures comprising:
a plurality of plasmonic layers, where each layer includes a pattern of metallic nanostructures, the nanostructures having dimensions and periods between adjacent nanostructures; and,
a plurality of non-metallic film layers, with at least one non-metallic film layer interposed between adjacent plasmonic layers;
the display further comprising:
a transparent top substrate overlying the 3D array of metallic nanostructures; and,
a color filter interposed between the top substrate and the 3D array of metallic nanostructures.
27. The display of claim 26 wherein the color filter is a phosphor color filter; and,
wherein the waveguide supplies light at a wavelength of about 450 nanometers.
28. The display of claim 26 further comprising:
a liquid crystal (LC) layer interposed between the bottom substrate and the polarizer;
wherein the bottom substrate is an active matrix of thin-film transistors (TFTs).