Method and apparatus for manufacturing vitreous silica crucible
Provided is a method for manufacturing a vitreous silica crucible and a manufacturing apparatus for the same, which can reduce the amount of bubbles and impurities of a crucible inner surface and enhance a crystallization yield of silicon single crystal. A method for manufacturing a vitreous silica crucible of the invention includes a silica powder supplying process of supplying silica powder in a rotating mold to form a silica powder layer; an arc fusing process of fusing the silica powder layer by arc discharge generated by carbon electrodes; and a fire polishing process of throwing an arc flame toward a target surface of the silica powder layer for surface removal, wherein, in the fire polishing process, the distances from the tips of the carbon electrodes to the target surface is set to be equal.
1. A method for manufacturing a vitreous silica crucible comprising:
a silica powder supplying process of supplying silica powder in a rotating mold to form a silica powder layer;
an arc fusing process of fusing the silica powder layer by arc discharge generated by carbon electrodes; and
a fire polishing process of throwing an arc flame toward a target surface of the silica powder layer for surface removal, wherein, in the fire polishing process, distances from tips of the carbon electrodes to the target surface are set to be equal, an angle of a central axis line of the carbon electrodes and a mold rotation axis is set to be 0.5 to 60°, the distances from the tips of the carbon electrodes to the target surface are set to be 5 to 200 mm, and the arc flame is set to be moved at a speed of 0.1 to 50 cm/min, and
wherein, after the arc fusing process, the fire polishing process is carried out so as to remove from the surface a thickness of 0.1 mm to 2 mm, and
wherein the silica powder layer consists of an outer layer of natural silica powder and an inner layer of synthetic silica powder.
2. The method of claim 1 , wherein the carbon electrodes are positioned so that the distances between the tips of the adjacent carbon electrodes are equal.
3. The method of claim 1 , wherein the fire polishing process is carried out during 10 to 90% of the total arc time.
4. The method of claim 1 , wherein, in the fire polishing process, the arc flame is moved from a bottom center to an upper end of the crucible.
5. The method of claim 1 , wherein, in the fire polishing process, the arc flame is moved from an upper end to a bottom center of the crucible.