Semiconductor manufacturing apparatus and semiconductor manufacturing method
A plated film having a uniform film thickness is formed on a surface of a substrate. A semiconductor manufacturing apparatus includes: a holding mechanism for holding a substrate rotatably; a nozzle for supplying a processing solution for performing a plating process on a processing target surface of the substrate; a substrate rotating mechanism for rotating the substrate held by the holding mechanism in a direction along the processing target surface; a nozzle driving mechanism for moving the nozzle in a direction along the processing target surface at a position facing the processing target surface of the substrate held by the holding mechanism; and a control unit for controlling the supply of the processing solution by the nozzle and the movement of the nozzle by the nozzle driving mechanism.
1. A semiconductor manufacturing apparatus comprising:
a holding mechanism configured to hold a substrate rotatably;
a nozzle configured to supply a processing solution for performing a plating process on a processing target surface of the substrate;
a substrate rotating mechanism configured to rotate the substrate held by the holding mechanism in a direction along the processing target surface;
a nozzle driving mechanism configured to move the nozzle in a direction along the processing target surface at a position facing the processing target surface of the substrate held by the holding mechanism; and
a control unit configured to control the supply of the processing solution by the nozzle and the movement of the nozzle by the nozzle driving mechanism,
wherein the control unit is configured to perform a first supplying process for supplying the processing solution while the nozzle driving mechanism moves the nozzle between a central portion and a periphery portion of the substrate, and the control unit is configured to perform a second supplying process for supplying the processing solution after the nozzle driving mechanism locates the nozzle at a preset position distanced away from an approximate center position of the substrate.
2. The semiconductor manufacturing apparatus of claim 1 , wherein in the second supplying process, the processing solution is supplied from the nozzle continuously or intermittently.
3. The semiconductor manufacturing apparatus of claim 1 , wherein when performing the second supplying process, the processing solution is supplied from the nozzle intermittently.
4. The semiconductor manufacturing apparatus of claim 3 , wherein when performing the second supplying process, a time period of supplying the processing solution is set to be longer than a time period of stopping the supply of the processing solution.
5. The semiconductor manufacturing apparatus of claim 3 , wherein when performing the second supplying process, a time period of supplying the processing solution is set to be shorter than a time period of stopping the supply of the processing solution.
6. The semiconductor manufacturing apparatus of claim 1 , wherein when performing the second supplying process, the processing solution is supplied after locating the nozzle at a position distanced away from an approximate center position of the substrate by about 30 to 110 mm.
7. The semiconductor manufacturing apparatus of claim 1 , wherein when performing the second supplying process, the processing solution is supplied after locating the nozzle at a position distanced away from an approximate center position of the substrate by about 30 to 70 mm.
8. The semiconductor manufacturing apparatus of claim 1 , wherein the nozzle supplies the processing solution at an inclination angle of about 45 to 90 degrees with respect to the processing target surface of the substrate.
9. The semiconductor manufacturing apparatus of claim 1 , wherein the nozzle supplies the processing solution at an inclination angle of about 50 to 70 degrees with respect to the processing target surface of the substrate.