Dark current reduction for back side illuminated image sensor
Provided is a semiconductor image sensor device that includes a non-scribe-line region and a scribe-line region. The image sensor device includes a first substrate portion disposed in the non-scribe-line region. The first substrate portion contains a doped radiation-sensing region. The image sensor device includes a second substrate portion disposed in the scribe-line region. The second substrate portion has the same material composition as the first substrate portion. Also provided is a method of fabricating an image sensor device. The method includes forming a plurality of radiation-sensing regions in a substrate. The radiation-sensing regions are formed in a non-scribe-line region of the image sensor device. The method includes forming an opening in a scribe-line region of the image sensor device by etching the substrate in the scribe-line region. A portion of the substrate remains in the scribe-line region after the etching. The method includes filling the opening with an organic material.
1. A semiconductor image sensor device, comprising:
a radiation-sensing region located in a silicon substrate, the radiation-sensing region being operable to sense radiation projected from a back side of the silicon substrate;
a silicon component located adjacent to the silicon substrate, wherein the silicon component is free of a dielectric material;
an organic component located over a back side of the silicon component; and
an interconnect structure located over a front side of the silicon substrate and a front side of the silicon component;
wherein:
the radiation-sensing region is located in a pixel region of the image sensor device; and
the silicon component and the organic component are located in a scribe-line region of the image sensor device.
2. The image sensor device of claim 1 , further comprising: an anti-reflective coating (ARC) layer located over the back side of the silicon substrate, wherein the silicon substrate is separated from the organic component by a portion of the ARC layer.
3. The image sensor device of claim 2 , wherein the silicon component is at least partially separated from the organic component by another portion of the ARC layer.
4. The image sensor device of claim 1 , wherein the silicon substrate is contiguous with the silicon component.
5. The image sensor device of claim 1 , wherein the interconnect structure includes one or more bonding pads.
6. The image sensor device of claim 1 , wherein the silicon component is substantially thinner than the silicon substrate.
7. The semiconductor image sensor device of claim 1 , wherein the silicon component and the silicon substrate have substantially identical material compositions.
8. A semiconductor image sensor device, comprising:
a semiconductor substrate having a pixel region;
a radiation-sensing region located in the pixel region;
a silicon component contiguous with the semiconductor substrate and located outside of the pixel region of the image sensor device;
an organic component located over a back side of the silicon component and located outside of the pixel region of the image sensor device; and
an interconnect structure located over a front side of the silicon component;
wherein the silicon component and the organic component are located in a scribe-line region of the semiconductor substrate, and wherein the silicon component has a substantially similar material composition as the semiconductor substrate and is free of a dielectric material.
9. The semiconductor image sensor device of claim 8 , further comprising: an anti-reflective coating (ARC) layer located over a back side of the semiconductor substrate, wherein the semiconductor substrate is separated from the organic component by a portion of the ARC layer.
10. The semiconductor image sensor device of claim 9 , wherein the silicon component is at least partially separated from the organic component by another portion of the ARC layer.
11. The semiconductor image sensor device of claim 8 , wherein the interconnect structure includes one or more bonding pads.
12. The semiconductor image sensor device of claim 8 , wherein the silicon component is substantially thinner than the semiconductor substrate.
13. A semiconductor image device, comprising:
a radiation-sensing element disposed in a semiconductor substrate, the radiation-sensing element being configured to detect radiation that enters the semiconductor substrate from a back side of the semiconductor device, wherein the radiation-sensing element is disposed within a pixel-region of the semiconductor device;
a semiconductor element disposed adjacent to the semiconductor substrate, wherein the semiconductor element and the semiconductor substrate have substantially identical material compositions, and wherein the semiconductor element is disposed in a scribe-line region of the semiconductor device;
an organic element disposed over the semiconductor element in the back side, wherein the organic element is disposed in the scribe-line region of the semiconductor device; and
an interconnect structure disposed over a front side of the semiconductor device.
14. The semiconductor image sensor device of claim 13 , wherein a first depth of the semiconductor element is substantially less than a second depth of the semiconductor substrate.
15. The semiconductor image sensor device of claim 14 , wherein:
the first depth is less than about 4000 Angstroms; and
the second depth is less than about 3 microns.
16. The semiconductor image sensor device of claim 13 , wherein the semiconductor element is in physical contact with a portion of the semiconductor substrate disposed within the pixel region of the semiconductor device.
17. The semiconductor image sensor device of claim 13 , further comprising an anti-reflective layer disposed over the portion of the semiconductor substrate in the pixel region and over the semiconductor element in the scribe-line region.
18. The semiconductor image sensor device of claim 13 , wherein the scribe-line region of the semiconductor device is free of any radiation-sensing elements.