Method of creating two-sided template from a single recorded master
The embodiments disclose a method of creating two-sided template from a single recorded master, including fabricating a first template using a single recorded master, wherein the first template has a changed duty cycle and an unchanged servo arc orientation, creating a replicate of the first template, wherein the replicate has a mirrored servo arc orientation and a changed duty cycle and fabricating a second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle for imprinting on a second side of a patterned stack.
1. A method of creating two-sided template from a single recorded master, comprising:
fabricating a side A first template using a single recorded side A master, wherein the side A first template has a changed duty cycle and an unchanged servo arc orientation;
creating a replicate of the first template, wherein the replicate has a mirrored servo arc orientation and a changed duty cycle;
fabricating a side B second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle; and
using a mix of reverse tone, imprint and etch processes to create the side A first template etched substrate and the side B second template etched substrate for use in fabricating a two-sided patterned stack.
2. The method of claim 1 , further comprising using a template design to form a first side template as the single recorded master.
3. The method of claim 1 , wherein the first template is fabricated using a reverse tone process with one of a chromium lift off process or a spin-on-glass over a negative resist process.
4. The method of claim 1 , wherein the first template is fabricated using a direct etching process.
5. The method of claim 1 , wherein the replicate is created using an imprint lithography process to create a mirrored servo arc orientation.
6. The method of claim 1 , wherein the second side template is fabricated using a reverse tone process with one of a direct etch, chromium lift off or spin-on-glass over a negative resist.
7. The method of claim 1 , further comprising the fabrication of templates using a process to mix reverse tone and imprint processes to create a family of first side and second side templates for use in the production of two-sided patterned stacks.
8. The method of claim 1 , wherein the servo arc orientation is mirrored using the replicate to fabricate a second side template using a reverse tone process.
9. The method of claim 1 , wherein the second side template is fabricated from a single recorded master to reduce the time for mastering templates for the fabrication of patterned stacks.
10. The method of claim 1 , further comprising using two-sided templates for the fabrication of two-sided patterned stacks using a single recorded master.
11. The method of claim 1 , wherein the fabricating of a second template with predetermined mirrored servo arc orientation and predetermined duty cycle is performed from a single recorded master for use in the fabrication of two-sided patterned stacks.
12. An apparatus, comprising:
means for fabricating a side A first template using a single recorded side A master to create a replicate;
means for creating a replicate of the side A first template to mirror the servo arc orientation and reverse the duty cycle;
means for fabricating a side B second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle of the single recorded master; and
means for using a mix of reverse tone, imprint and etch processes to create the side A first template etched substrate and the side B second template etched substrate for use in fabricating two-sided patterned stacks.
13. The apparatus of 12 , further comprising means for using a single recorded master to create a first template using a reverse tone process.
14. The apparatus of 12 , further comprising means for creating a replicate of the first template using imprint lithography.
15. The apparatus of 12 , further comprising means for using the replicate to fabricate a second side template using a reverse tone process to produce the predetermined mirrored servo arc orientation and predetermined duty cycle of the single recorded master.
16. The apparatus of 12 , further comprising means for mixing reverse tone and imprint lithography processes to create a family of first side and second side templates for use in the two-sided fabrication of patterned stacks.
17. A second side template, comprising:
a predetermined mirrored servo arc orientation; and
a predetermined duty cycle, wherein the predetermined mirrored servo arc orientation and the predetermined duty cycle are created using a single recorded master for two-sided fabrication of patterned stacks.
18. The second side template of claim 17 , further comprising using a reverse tone process to fabricate a first template.
19. The second side template of claim 17 , further comprising using a mixed process including a reverse tone process to fabricate the first template and an imprint lithography process to fabricate a replicate of the first template.
20. The second side template of claim 19 , wherein the mixed process creates a family of first side and second side templates for use in the two-sided fabrication of patterned stacks.