Etchant, display device and method for manufacturing display device using the same
An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.
1. An etchant, comprising:
7 to 18 wt % of persulfate,
1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture comprising at least one of the foregoing,
0.3 to 5 wt % of a cyclic amine compound,
1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture comprising at least one of the foregoing,
0.1 to 5 wt % of p-toluenesulfonic acid, and water,
based on the total weight of the etchant.
2. The etchant of claim 1 , wherein the persulfate is selected from ammonium persulfate, sodium persulfate, potassium persulfate, or a combination comprising at least one of the foregoing.
3. The etchant of claim 2 , wherein the inorganic acid is selected from nitric acid, sulfuric acid, phosphoric acid, perchloric acid, or a combination comprising at least one of the foregoing, and the inorganic acid salt is selected from nitrate, sulfate, phosphate, perchlorate, or a combination comprising at least one of the foregoing.
4. The etchant of claim 3 , wherein the cyclic amine compound is selected from 5-aminotetrazole, tolyltriazole, benzotriazole, methyltriazole, or a combination comprising at least one of the foregoing.
5. The etchant of claim 4 , wherein the organic acid is selected from acetic acid, glycolic acid, citric acid, oxalic acid, or a combination comprising at least one of the foregoing, and the organic acid salt is selected from a potassium salt, a sodium salt, an ammonium salt, or a combination comprising at least one of the foregoing of a compound selected from acetic acid, glycolic acid, citric acid, oxalic acid, or a combination comprising at least one of the foregoing.
6. The etchant of claim 5 , further comprising 0.01 to 2 wt % of a fluoride-containing compound, based on the total weight of the etchant.
7. The etchant of claim 6 , wherein the fluoride-containing compound is selected from ammonium fluoride, sodium fluoride, potassium fluoride, ammonium bifluoride, sodium bifluoride, potassium bifluoride, or a combination comprising at least one of the foregoing.
8. The etchant of claim 1 , further comprising 0.01 to 2 wt % of a fluoride-containing compound, based on the total weight of the etchant.
9. The etchant of claim 8 , wherein the fluoride-containing compound is selected from ammonium fluoride, sodium fluoride, potassium fluoride, ammonium bifluoride, sodium bifluoride, potassium bifluoride, or a combination comprising at least one of the foregoing.