Fabricating method of gas barrier substrate, organic electro-luminescent device and packaging method thereof
A gas barrier substrate including a first gas barrier layer, a substrate, and a second gas barrier layer is provided. The first gas barrier layer has a central bonding surface bonded with the substrate and a peripheral boding surface surrounding the central bonding surface. The second gas barrier layer entirely covers the substrate and the first gas barrier layer. The second gas barrier layer is bonded with the substrate and the peripheral boding surface of the first gas barrier layer, wherein a minimum distance from an edge of the substrate to an edge of the first gas barrier layer is greater than a thickness of the first gas barrier layer.
1. A fabricating method of a gas barrier substrate, comprising:
forming a de-bonding layer on a carrier;
forming a lift-off layer on the carrier;
forming a first gas barrier layer on the lift-off layer, the first gas barrier layer having a central bonding surface and a peripheral bonding surface which surrounds the central bonding surface;
coating a substrate on the central bonding surface of the first gas barrier layer and bonding the substrate with the central bonding surface, wherein the substrate has a tapered sidewall, and an acute angle is included between the tapered sidewall and the central bonding surface;
forming a second gas barrier layer, covering the substrate and the first gas barrier layer, wherein the second gas barrier layer is bonded with the substrate and the peripheral bonding surface of the first gas barrier layer, and a minimum distance from an edge of the substrate to an edge of the first gas barrier layer is greater than a thickness of the first gas barrier layer; and
cutting the de-bonding layer, the lift-off layer, the first gas barrier layer, and the second gas barrier layer along a cutting line between the edge of the substrate and an edge of the lift-off layer, so that the lift-off layer is separated from the de-bonding layer.
2. The fabricating method of the gas barrier substrate as claimed in claim 1 , wherein a method of coating the substrate on the central bonding surface comprises:
coating a material layer on the central bonding surface; and
curing the material layer to form the substrate.
3. The fabricating method of the gas barrier substrate as claimed in claim 1 , wherein a method of forming the first gas barrier layer comprises:
forming a silicon nitride layer on the lift-off layer.
4. The fabricating method of the gas barrier substrate as claimed in claim 1 , wherein a method of forming the first gas barrier layer comprises:
forming a stacked layer on the lift-off layer, wherein the stacked layer comprises at least one silicon nitride layer and at least one spin-on glass layer.
5. The fabricating method of the gas barrier substrate as claimed in claim 1 , wherein a method of forming the second gas barrier layer comprises:
forming a silicon nitride layer on the lift-off layer.
6. The fabricating method of the gas barrier substrate as claimed in claim 1 , wherein a method of forming the second gas barrier layer comprises:
forming a stacked layer on the lift-off layer, wherein the stacked layer comprises at least one silicon nitride layer and at least one spin-on glass layer.
7. A packaging method of an organic electro-luminescent device, comprising:
forming an organic electro-luminescent device on a first gas barrier substrate;
providing a second gas barrier substrate; and
bonding the first gas barrier substrate and the second gas barrier substrate, so that the organic electro-magnetic device is sealed between the first gas barrier substrate and the second gas barrier substrate, wherein at least one of the first gas barrier substrate and the second gas barrier substrate is fabricated by the fabricating method of the gas barrier substrate as claimed in claim 1 .