Silicided semiconductor structure and method of forming the same
A preferred embodiment includes a method of manufacturing a fuse element that includes forming a polysilicon layer over a semiconductor structure, doping the polysilicon layer with carbon or nitrogen, depositing a metal over the polysilicon layer; and annealing the metal and polysilicon layer to form a silicide in an upper portion of the polysilicon layer.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a polysilicon layer;
doping the polysilicon layer with carbon or nitrogen;
patterning the polysilicon layer to form a fuse element;
forming a metal layer prior to forming the polysilicon layer, the metal layer being removed from a region of the fuse element;
patterning the polysilicon layer to form a transistor gate, the transistor gate being spaced from the fuse element;
depositing a metal over the polysilicon layer; and
annealing the metal and the polysilicon layer to form a silicide region in an upper portion of the polysilicon layer.
2. The method of claim 1 , wherein depositing the metal over the polysilicon layer comprises depositing the metal over the fuse element and over the transistor gate, and wherein annealing forms a silicide region of a first thickness of the fuse element and a silicide region of a second thickness over the transistor gate, the first thickness being smaller than the second thickness.
3. The method of claim 2 , wherein the second thickness is substantially the same as a thickness of the transistor gate thereby forming a fully silicided gate.
4. The method of claim 1 , wherein the doping comprises ion implantation at an energy level of about 5 keV to 20 keV and an implantation dose of about 10 10 dopants/cm 2 to 10 13 dopants/cm 2 .