Composite substrate with partially planarized irregular surface
In a composite substrate 10 , a bonding surface 21 of a piezoelectric substrate 20 is an irregular surface which is partially planarized. The irregular surface which is partially planarized includes a plurality of protrusions 23, each having a flat portion 25 on the tip thereof. The piezoelectric substrate 20 and the supporting substrate 30 are directly bonded to each other at the flat portions 25. By forming the bonding surface 21 into an irregular surface (rough surface) and providing flat portions 25 at the same time, it is possible to secure a sufficient contact area between the piezoelectric substrate 20 and the supporting substrate 30 . Accordingly, in the composite substrate in which the piezoelectric substrate 20 and the supporting substrate 30 are bonded to each other, the bonding surface 21 can be roughened and direct bonding can be performed.
1. A composite substrate comprising:
a piezoelectric substrate; and
a supporting substrate directly bonded to the piezoelectric substrate,
wherein at least one of a bonding surface of the piezoelectric substrate and a bonding surface of the supporting substrate is an irregular surface which is partially planarized, the irregular surface which is partially planarized includes a plurality of protrusions, each having a flat portion on the tip thereof, and the piezoelectric substrate and the supporting substrate are directly bonded to each other at the flat portions, and
in the irregular surface which is partially planarized, an arithmetic average roughness Ra of the flat portions is 1 nm or less, and an arithmetic average roughness Ra of portions other than the flat portions is 10 nm or more.
2. The composite substrate according to claim 1 , wherein the percentage of the area of the flat portions in the area of the irregular surface which is partially planarized is 30% to 80%.
3. A surface acoustic wave device comprising:
the composite substrate according to claim 1 ; and
an electrode which is disposed on the piezoelectric substrate and capable of exciting a surface acoustic wave.