Replacement source/drain finFET fabrication
A finFET is formed having a fin with a source region, a drain region, and a channel region between the source and drain regions. The fin is etched on a semiconductor wafer. A gate stack is formed having an insulating layer in direct contact with the channel region and a conductive gate material in direct contact with the insulating layer. The source and drain regions are etched to expose a first region of the fin. A portion of the first region is then doped with a dopant.
1. A method for fabricating a fin field effect transistor (finFET) comprising:
etching a semiconductor substrate to form a source cavity and a drain cavity, wherein the source cavity and the drain cavity are disposed on opposite sides of a channel region;
doping at least a portion of the channel region with a dopant;
growing semiconductor in the source cavity and the drain cavity to form a source epitaxy region and a drain epitaxy region, respectively, on opposite sides of the channel region;
forming a fin of the finFET by etching the semiconductor substrate, the fin comprising the channel region, the source epitaxy region, and the drain epitaxy region; and
forming a gate stack on the channel region, the gate stack having an insulating layer in direct contact with the channel region, and a gate material in direct contact with the insulating layer.
2. The method of claim 1 , wherein semiconductor grown in the source cavity and the drain cavity is doped in-situ.
3. The method of claim 1 , wherein growing semiconductor in the source cavity and the drain cavity is done epitaxially.
4. The method of claim 1 further comprising:
depositing an isolation layer around and on the fin; and
polishing the isolation layer to have a top surface approximately coplanar with the surface of the fin.
5. The method of claim 4 , wherein depositing an isolation layer and polishing the isolation layer occurs prior to forming the gate stack.
6. The method of claim 5 further comprising:
etching the isolation layer back to expose a top portion of the fin while the isolation layer still covers a bottom portion of the fin.
7. The method of claim 1 , wherein the channel region has an intrinsic strain, wherein the source epitaxy region and the drain epitaxy region have a first strain, and wherein the first strain of the source epitaxy region and the drain epitaxy region modifies the intrinsic strain of at least a part of the channel region to increase the mobility of electrons or holes in the channel region.
8. The method of claim 1 , wherein the semiconductor substrate is a bulk silicon wafer.
9. The method of claim 1 , wherein the source epitaxy region and the drain epitaxy region are a different material than the semiconductor substrate.
10. The method of claim 1 , wherein growing semiconductor in the source cavity and the drain cavity comprises growing semiconductor selectively to a material of the semiconductor substrate.
11. The method of claim 1 further comprising:
removing a portion of the gate stack; and
forming a metal gate over the channel region.
12. The method of claim 11 , further comprising:
depositing a dielectric layer on the channel region before forming the metal gate over the channel region.
13. The method of claim 1 , wherein doping at least a portion of the channel region is performed using a tilt angle implantation.
14. The method of claim 1 ,
wherein doping at least a portion of the channel region comprises:
applying a doping precursor to the at least a portion;
depositing a cap layer over the at least a portion; and
annealing the fin.
15. The method of claim 14 , wherein doping at least the portion of the channel region further comprises:
removing the cap layer.
16. The method of claim 14 , wherein applying the doping precursor includes applying a wet chemical containing the precursor to the at least a portion.
17. The method of claim 14 , wherein applying the doping precursor includes depositing the precursor on the at least a portion.
18. A method for fabricating a fin field effect transistor (finFET) comprising:
forming a fin by etching a semiconductor substrate, the fin having a source region, a drain region, and a channel region between the source region and the drain region;
depositing an isolation layer around and on the fin;
polishing the isolation layer, wherein a top surface of the isolation layer is approximately coplanar with a top surface of the fin;
etching the source region and the drain region to form a source cavity and a drain cavity;
doping at least a portion of the channel region with a dopant;
growing semiconductor in the source cavity and the drain cavity to form a source epitaxy region and a drain epitaxy region;
etching the isolation layer to expose at least a portion of the fin, wherein etching the isolation layer is performed after etching the source region and the drain region and after growing semiconductor in the source cavity and the drain cavity; and
forming a gate stack on the channel region, the gate stack having an insulating layer in direct contact with the channel region, and a gate material in direct contact with the insulating layer.