Joining electrode, method of manufacturing the same, semiconductor device, and method of manufacturing the same
Disclosed herein is a joining electrode including: an insulating layer; a recessed portion formed in the insulating layer; a covering layer formed on a side surface and a bottom surface of the recessed portion; and a joining metallic layer formed on the covering layer and having an upper surface protruding from a surface of the insulating layer.
1. A joining electrode comprising:
a trench extending partially into an insulating layer and terminating in said insulating layer, said trench having a bottom surface and an upper surface;
a metallic covering layer lining a side surface of the trench and said bottom surface of the trench, said metallic covering layer forming a basin;
a joining metallic layer filling said basin and having a protruded surface;
wherein the metallic covering layer lining the side surface of the trench is partially recessed below the upper surface of the trench and the protruded surface of the joining metallic layer, thereby forming a cavity between the joining metallic layer and said side surface of the trench.
2. The joining electrode according to claim 1 , wherein said protruded surface of the joining metallic layer protrudes from within said basin, said cavity being below the upper surface of the trench and the upper surface of the joining metallic layer.
3. The joining electrode according to claim 1 , wherein said metallic covering layer includes a barrier metal.
4. The joining electrode according to claim 1 , wherein said joining metallic layer is a material from the group consisting of copper, aluminum, and tungsten.
5. A semiconductor device comprising:
the joining electrode according to claim 1 ;
a semiconductor substrate in physical contact with a surface of the insulating layer,
wherein said surface of the insulating layer is between said semiconductor substrate and said bottom surface of the trench.