Scanned probe microscopy (SPM) probe having angled tip
A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
1. A probe for scanned probe microscopy, comprising:
a cantilever beam extending along a generally horizontal axis, the cantilever beam having a crystal facet surface at a chamfered end of the beam that is oriented at a tilt angle with respect to the generally horizontal axis, wherein the chamfered end of the beam has a vertical surface that runs orthogonal to the generally horizontal axis, such that a length of the vertical surface is less than a thickness of the cantilever beam, the vertical surface forming an obtuse angle with the crystal facet surface; and
an epitaxial nanowire tip projecting outwardly from the crystal facet surface.
2. The probe of claim 1 , wherein the tip is oriented generally orthogonal to the crystal facet surface.
3. The probe of claim 1 , wherein the tilt angle is based on a tilt correction factor, wherein the tilt correction factor is based on a desired angled position of the cantilever beam in a scanned probe microscopy machine.
4. The probe of claim 1 , wherein the tilt angle is about 13°.
5. The probe of claim 1 , wherein the crystal facet surface is selected from a group comprising: a {111} crystalline plane, a {100} crystalline plane, a {112} plane, and a {1110} crystalline plane.
6. The probe of claim 1 , wherein the cantilever beam is constructed from is selected from the group consisting of a single-crystal silicon and a single-crystal germanium.
7. The probe of claim 1 , wherein the cantilever beam includes a distal end portion, and wherein the crystal facet surface is located at the distal end portion of the cantilever beam.
8. The probe of claim 1 , further comprising a handling port, wherein a proximate end portion of the cantilever beam is attached to the handling port.
9. The probe of claim 8 , wherein handling port is constructed from a support wafer portion, a buried oxide (BOX) layer, and a device layer.
10. The probe of claim 1 , wherein the probe is an atomic force microscopy (AFM) probe.
11. A probe for scanned probe microscopy, comprising:
a cantilever beam extending along a generally horizontal axis, the cantilever beam having a crystal facet surface at a chamfered end of the beam that is oriented at a tilt angle with respect to the generally horizontal axis, wherein the chamfered end of the beam has a vertical surface that runs orthogonal to the generally horizontal axis, such that a length of the vertical surface is less than a thickness of the cantilever beam, the vertical surface forming an obtuse angle with the crystal facet surface; and
an epitaxial nanowire tip projecting outwardly from the crystal facet surface, the tip oriented generally orthogonal to the crystal facet surface.
12. The probe of claim 11 , wherein the tilt angle is based on a tilt correction factor, wherein the tilt correction factor is based on an angled position of the cantilever beam in a scanned probe microscopy machine.
13. The probe of claim 11 , wherein the tilt angle is about 13°.
14. The probe of claim 11 , wherein the crystal facet surface is selected from a group comprising: a {111} crystalline plane, a {100} crystalline plane, a {112} plane, and a {110} crystalline plane.
15. The probe of claim 11 , wherein the cantilever beam is constructed from the group consisting of a single-crystal silicon and a single-crystal germanium.
16. The probe of claim 1 , wherein the epitaxial nanowire tip has a substantially uniform diameter.
17. The probe of claim 16 , wherein the epitaxial nanowire tip has an aspect ratio of at least 100:1.
18. The probe of claim 11 , wherein the epitaxial nanowire tip has a substantially uniform diameter.
19. The probe of claim 18 , wherein the epitaxial nanowire tip has an aspect ratio of at least 100:1.