Acoustic wave device and module including a dielectric film with an inclined upper surface
An acoustic wave device includes: a substrate; a dielectric film formed on the substrate; opposing comb-shaped electrodes located between the substrate and the dielectric film, each of the opposing comb-shaped electrodes including an electrode finger, wherein at least one of the substrate and the dielectric film is a piezoelectric substance, an upper surface of the dielectric film, which is located above a gap between a tip of an electrode finger of one of the opposing comb-shaped electrodes and the other of the opposing comb-shaped electrodes, is inclined against an upper surface of the substrate in an extension direction of the electrode finger, and an inclination angle of the upper surface of the dielectric film against the upper surface of the substrate is equal to or larger than 30° and equal to or smaller than 50°.
1. An acoustic wave device comprising:
a substrate;
a dielectric film formed on the substrate;
opposing comb-shaped electrodes located between the substrate and the dielectric film, each of the opposing comb-shaped electrodes including an electrode finger, wherein
at least one of the substrate and the dielectric film is a piezoelectric substance,
an upper surface of the dielectric film, which is located above a gap between a tip of an electrode finger of one of the opposing comb-shaped electrodes and the other of the opposing comb-shaped electrodes, is inclined against an upper surface of the substrate in an extension direction of the electrode finger, and
an inclination angle of the upper surface of the dielectric film against the upper surface of the substrate is equal to or larger than 30° and equal to or smaller than 50°.
2. The acoustic wave device according to claim 1 , wherein
the upper surface of the dielectric film is inclined across an entire region above the gap.
3. The acoustic wave device according to claim 1 , wherein
each of the opposing comb-shaped electrodes includes the electrode finger and a bus bar, and a film thickness of the dielectric film on the electrode finger is different from a film thickness of the dielectric film on the bus bar.
4. The acoustic wave device according to claim 1 , wherein
a difference of film thickness in the dielectric film caused by an inclination of the upper surface of the dielectric film is larger than film thicknesses of the opposing comb-shaped electrodes.
5. The acoustic wave device according to claim 1 , further comprising:
IDTs, each including the opposing comb-shaped electrodes, wherein
the IDTs have different inclination angles.
6. The acoustic wave device according to claim 5 , wherein
the IDTs include a first IDT included in a series resonator of a ladder-type filter, and a second IDT included in a parallel resonator of the ladder-type filter, and
the first IDT and the second IDT have different inclination angles.
7. A module comprising:
an acoustic wave device according to claim 1 .