Torque sensor
Disclosed herein is a torque sensor. The torque sensor includes a cylindrical upper case having one open end and an overload prevention member that is fixed to the upper case to prevent overload. A lower case covers the open end of the upper case and an elastic structure member is disposed on the lower case to detect deformation. Additionally, a silicon structure member is disposed on the elastic structure member to detect deformation.
1. A torque sensor, comprising:
a cylindrical upper case having one open end;
an overload prevention member fixed to the cylindrical upper case to prevent overload;
a lower case configured to cover the open end of the cylindrical upper case;
an elastic structure member disposed on the lower case to detect deformation; a silicon structure member disposed on the elastic structure member to detect deformation, wherein the elastic structure member is a circular disk shape and includes:
an upper fastening portion and a lower fastening portion configured to lock the upper case to the lower case,
a plurality of space portions formed between the upper fastening portion and the lower fastening portion into which the silicon structure member is inserted, and
a first deformation generation portion disposed between the plurality of space portions and configured to detect deformation of the plurality of space portions; and
wherein the silicon structure member is a rectangular plate shape and includes:
an external structure inserted into each space portion,
an internal structure disposed in the external structure,
a second deformation generation portion configured to connect the internal structure to the external structure to generate deformation, and
a deformation sensing unit inserted into the second deformation generation portion to detect the deformation.
2. The torque sensor according to claim 1 , wherein the deformation sensing unit includes a plurality of deformation sensing portions connected to each other.