Motion conversion system
A motion conversion system is described. The motion conversion system comprises a first torsional member operative for rotating in a first direction. A second torsional member is offset a distance from the first torsional member, wherein the second torsional member is operative for rotating in a direction opposite from the first direction. And, a lateral member has a lower surface connected to the first and second torsional members. Wherein, translational movement of the lateral member results from rotational movement of the first and second torsional members.
1. A microelectromechanical system (MEMS) device, comprising:
a movable first MEMS component;
a second MEMS component comprising a support structure fixed for rotation about a first axis and separated by a clearance distance from the first MEMS component; and
a hinge element having a first end connected to the second MEMS component and a second end connected to the first MEMS component;
the first MEMS component, second MEMS component, hinge and first and second hinge ends aligned along a second axis orthogonal to the first axis; and
the hinge element configured and dimensioned so that rotational movement of the second MEMS component about the first axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component in a direction orthogonal to the first and second axes.
2. The device of claim 1 , wherein the first end is connected to the second MEMS component at first and second opposing first end attachment portions offset by a distance from the second axis on opposite sides of the first end; and the second end is connected to the first MEMS component at first and second opposing second end attachment portions offset by a distance from the second axis on opposite sides of the second end.
3. The device of claim 2 , wherein the hinge element includes a central offset portion that extends symmetrically and orthogonally outwardly relative to the second axis from a central beam section of the hinge element.
4. The device of claim 3 , wherein the first and second MEMS components and the hinge element are aligned along a shared longitudinal axis.
5. The device of claim 4 , wherein the first and second MEMS components and the hinge element are formed in a same device metal layer.
6. The device of claim 4 , wherein the hinge element and first and second MEMS components have identical thicknesses.
7. The device of claim 4 , wherein at least one of the first and second MEMS components is formed from semiconductor material.
8. The device of claim 1 , wherein the hinge element includes a central offset portion that extends symmetrically and orthogonally outwardly relative to the second axis from a central beam section of the hinge element.
9. The device of claim 1 , wherein the first and second MEMS components and the hinge element are aligned along a shared longitudinal axis.
10. The device of claim 1 , wherein the first and second MEMS components and the hinge element are formed in a same device metal layer.
11. The device of claim 1 , wherein the hinge element and first and second MEMS components have identical thicknesses.
12. The device of claim 1 , wherein at least one of the first and second MEMS components is formed from semiconductor material.
13. The device of claim 1 , further comprising:
a third MEMS component rotatable about a third axis spaced from and parallel to the first axis;
a second hinge element connecting the first and third MEMS components so that rotational movement of one of the first or third MEMS components about the corresponding one of the first or third axis causes corresponding, complementary rotational movement of the other of the first or third MEMS component about the corresponding other of the first or third axis, causing translational movement of the first MEMS component relative to the third MEMS component in the direction orthogonal to the first, second and third axes.
14. The device of claim 1 , further comprising:
a third MEMS component rotatable about a third axis spaced from and parallel to the first axis;
a second hinge element connecting the first and third MEMS components so that rotational movement of the third MEMS component about the third axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component relative to the third MEMS component in the direction orthogonal to the first, second and third axes.
15. A microelectromechanical system (MEMS) device, comprising:
a movable first MEMS component;
a second MEMS component comprising a first support structure fixed for rotation about a first axis and separated by a first clearance distance from the first MEMS component;
a first hinge element having a first end connected to the second MEMS component and a second end connected to a first end of the first MEMS component;
a third MEMS component comprising a second support structure fixed for rotation about a second axis parallel to the first axis and separated by a second clearance distance from the first MEMS component; and
a second hinge element having a first end connected to the third MEMS component and a second end connected to second end of the first MEMS component;
the first, second and third MEMS components, the first and second hinges, and the first and second hinge ends of the first and second hinges being aligned along a third axis orthogonal to the first and second axes; and
the first and second hinge elements being configured and dimensioned so that rotational movement of each of the second and third MEMS components about its respective first or second axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component in a direction ( 436 ) orthogonal to the first, second and third axes.
16. A microelectromechanical system (MEMS) device, comprising:
a movable first elongated MEMS component;
a second elongated MEMS component comprising a support structure fixed for rotation about a pivotal axis and separated by a clearance distance from the first MEMS component; and
an elongated hinge element having a first end connected to the second MEMS component and a second end connected to the first MEMS component;
the elongations of the first and second MEMS components and of the hinge and the first and second hinge ends being aligned along a longitudinal axis orthogonal to the pivotal axis; and
the hinge element configured and dimensioned so that rotational movement of the second MEMS component about the pivotal axis causes corresponding, complementary rotational movement of the first MEMS component, causing translational movement of the first MEMS component in a direction orthogonal to the pivotal and longitudinal axes.