IP Library Granted Patent US 8,935,639
Granted Patent B1
US 8,935,639 · App. 13/779,615 · Granted Jan 13, 2015

Natively color-aware double patterning technology (DPT) compliant routing

Inventor: Ping-San Tzeng (Fremont, CA)
Assignee: Atoptech, Inc.
G06F17/5077
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Quick Facts
Patent No.
US 8,935,639
App. No.
13/779,615
Granted
Jan 13, 2015
Kind
B1
Abstract

A route technique includes: receiving an input specifying a plurality of semiconductor device components and their logical connections; determining route information pertaining to a plurality of routes that connect in one or more metal layers the semiconductor device components according to their logical connections, the determination being based at least in part on a plurality of predefined tracks associated with a metal layer; and outputting at least a portion of the route information. A first portion of the plurality of predefined tracks corresponds to a first color and a second portion of the plurality of predefined tracks corresponds to a second color.

Claims (49)

1. A routing method comprising:

receiving an input including circuit information pertaining to a plurality of semiconductor device components and their logical connections, and pre-coloring information of a circuit portion;

determining, using one or more processors, route information pertaining to a plurality of routes that connect in one or more metal layers the semiconductor device components according to their logical connections, the determination being based at least in part on a plurality of predefined tracks associated with a metal layer and at least according to the pre-coloring information; and

outputting at least a portion of the route information; wherein:

a first portion of the plurality of predefined tracks is pre-assigned a first color and a second portion of the plurality of predefined tracks is pre-assigned a second color;

the first color corresponds to a first pattern that is to be produced using a first mask;

the second color corresponds to a second pattern that is to be produced using a second mask;

the pre-coloring information of the circuit portion indicates that at least some of the plurality of routes of the circuit portion correspond to a user-defined color X, which specifies that the at least some of the plurality of routes of the circuit portion are a single color, but does not require the at least some of the plurality of routes of the circuit portion to be associated with a specific color among available colors as long as the at least some of the plurality of routes of the circuit portion are the same color; and

polygons associated with the pre-colored circuit portion are determined to correspond to either the first color or the second color.

2. The method of claim 1 , wherein the plurality of routes are associated with a plurality of polygons, and the determination is subject to a rule requiring neighboring polygons of the same color to be separated by at least a Same-Photo-Mask Minimum Spacing (S-min).

3. The method of claim 1 , wherein the plurality of routes are associated with a plurality of polygons, and the determination is subject to a rule requiring neighboring polygons of different colors to be separated by at least a Different-Photo-Mask Minimum Spacing (D-min).

4. The method of claim 1 , wherein adjacent tracks associated with a single metal layer correspond to different colors.

5. The method of claim 1 , wherein within a single metal layer, wires positioned on two adjacent tracks have a minimum separation distance that is less than a Same-Photo-Mask Minimum Spacing (S-min) of a single color permitted by a semiconductor fabrication process.

6. The method of claim 1 , wherein determining the route information includes determining respective colors of the plurality of routes.

7. The method of claim 6 , wherein routes that correspond to the first color are manufactured using a first mask, and routes that correspond to the second color are manufactured using a second mask.

8. The method of claim 1 , wherein determining the route information pertaining to the plurality of routes includes:

determining a plurality of polygons based at least in part on the input; and

positioning at least some of the plurality of polygons on the plurality of predefined tracks.

9. The method of claim 8 , further comprising associating a polygon with a corresponding color of a track on which the polygon is positioned.

10. The method of claim 8 , wherein the route information includes position information associated with the plurality of polygons.

11. The method of claim 1 , wherein the input further includes specification of a pre-colored net.

12. The method of claim 11 , wherein the pre-colored net includes a clock tree.

13. The method of claim 11 , wherein the pre-colored net includes a critical net.

14. The method of claim 11 , wherein the pre-colored net includes a pre-colored pin of a macro.

15. The method of claim 1 , wherein the input further includes a specification of a color of a route as a user-defined color or a program-defined color.

16. The method of claim 1 , wherein the input further includes a specification of a color of a route as one of: user-defined color 1, user-defined color 2, program-defined color 1, program-defined color 2, or user-defined color X.

17. The method of claim 1 , wherein the route information pertaining to one of the plurality of routes indicates that the one of the plurality of routes is one of: user-defined color 1, user-defined color 2, program-defined color 1, program-defined color 2, or user-defined color X.

18. The method of claim 1 , further comprising determining placement information of the plurality of semiconductor device components.

19. The method of claim 1 , further comprising overwriting a color assignment of a route, wherein the color assignment that is overwritten was assigned according to colors of the plurality of predefined tracks.

20. A system comprising:

one or more processors configured to:

receive an input including circuit information pertaining to a plurality of semiconductor device components and their logical connections, and pre-coloring information of a circuit portion;

determine, using one or more processors, route information pertaining to a plurality of routes that connect in one or more metal layers the semiconductor device components according to their logical connections, the determination being based at least in part on a plurality of predefined tracks associated with a metal layer and at least according to the pre-coloring information; and

output at least a portion of the route information; and

one or more memories coupled to the one or more processors, configured to provide the one or more processors with instructions; wherein:

a first portion of the plurality of predefined tracks is pre-assigned a first color and a second portion of the plurality of predefined tracks is pre-assigned a second color;

the first color corresponds to a first pattern that is to be produced using a first mask;

the second color corresponds to a second pattern that is to be produced using a second mask;

the pre-coloring information of the circuit portion indicates that at least some of the plurality of routes of the circuit portion correspond to a user-defined color X, which specifies that the at least some of the plurality of routes of the circuit portion are a single color, but does not require the at least some of the plurality of routes of the circuit portion to be associated with a specific color among available colors as long as the at least some of the plurality of routes of the circuit portion are the same color; and

polygons associated with the pre-colored circuit portion are determined to correspond to either the first color or the second color.

21. A computer program product for routing, the computer program product being embodied in a non-transitory computer readable storage medium and comprising computer instructions for:

receiving an input including circuit information pertaining to a plurality of semiconductor device components and their logical connections, and pre-coloring information of a circuit portion;

determining, using one or more processors, route information pertaining to a plurality of routes that connect in one or more metal layers the semiconductor device components according to their logical connections, the determination being based at least in part on a plurality of predefined tracks associated with a metal layer and at least according to the pre-coloring information; and

outputting at least a portion of the route information; wherein:

a first portion of the plurality of predefined tracks is pre-assigned a first color and a second portion of the plurality of predefined tracks is pre-assigned a second color;

the first color corresponds to a first pattern that is to be produced using a first mask;

the second color corresponds to a second pattern that is to be produced using a second mask;

the pre-coloring information of the circuit portion indicates that at least some of the plurality of routes of the circuit portion correspond to a user-defined color X, which specifies that at least some of the plurality of routes of the circuit portion are a single color, but does not require the at least some of the plurality of routes of the circuit portion to be associated with a specific color among available colors as long as the at least some of the plurality of routes of the circuit portion are the same color; and

polygons associated with the pre-colored circuit portion are determined to correspond to either the first color or the second color.

Assignments (5)
MERGER AND CHANGE OF NAME Recorded Dec 2, 2020
From: AVATAR INTEGRATED SYSTEMS, INC.; SIEMENS INDUSTRY SOFTWARE INC.
To: SIEMENS INDUSTRY SOFTWARE INC.
Reel/Frame 054514/0076 →
RELEASE OF SECURITY INTEREST Recorded Aug 21, 2020
From: MENTOR GRAPHICS CORPORATION
To: AVATAR INTEGRATED SYSTEMS, INC.
Reel/Frame 053558/0632 →
SECURITY INTEREST Recorded Jul 16, 2020
From: AVATAR INTEGRATED SYSTEMS, INC.
To: MENTOR GRAPHICS CORPORATION
Reel/Frame 053224/0268 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2017
From: ATOPTECH, INC.
To: AVATAR INTEGRATED SYSTEMS, INC.
Reel/Frame 042751/0437 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 24, 2013
From: TZENG, PING-SAN
To: ATOPTECH, INC.
Reel/Frame 030485/0608 →
Continuity (1)
Provisional Application 61694619 · Aug 29, 2012