IP Library Granted Patent US 8,936,982
Granted Patent B2
US 8,936,982 · App. 13/720,109 · Granted Jan 20, 2015

Semiconductor device with buried bit line and method for fabricating the same

Inventors: Heung-Jae Cho (Gyeonggi-do, KR); Eui-Seong Hwang (Gyeonggi-do, KR); Eun-Shil Park (Gyeonggi-do, KR)
Assignee: SK hynix Inc.
H01L27/0629H01L21/8239H01L27/10876H01L27/10885H01L29/41741H01L29/66666H01L29/7827H01L29/456
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Quick Facts
Patent No.
US 8,936,982
App. No.
13/720,109
Granted
Jan 20, 2015
Kind
B2
Abstract

A method for fabricating a semiconductor device includes etching a semiconductor substrate to form bulb-type trenches that define a plurality of active regions in the semiconductor substrate; forming a supporter in each of the bulb-type trenches; dividing each active region, of the plurality of active regions, into a pair of body lines by forming a trench through each active region; and forming a bit line in each body line of the pair of body lines.

Claims (17)

1. A method for fabricating a semiconductor device, the method comprising:

etching a semiconductor substrate to form bulb-type trenches that define a plurality of active regions in the semiconductor substrate;

forming a supporter in each of the bulb-type trenches;

dividing each of the plurality of active regions into a pair of body lines by forming a trench through each of the plurality of active regions; and

forming a bit line in each of the pair of body lines.

2. The method of claim 1 , further comprising:

after forming the bit lines, etching the pair of body lines to form a pair of pillars, where each pillar, of the pair of pillars, includes a channel region; and

forming a capacitor connected to an upper portion of each pillar.

3. The method of claim 1 , wherein the forming of the bulb-type trenches comprises:

etching the semiconductor substrate to form a plurality of first trenches that are defined by sidewalls of the active regions;

forming spacers over the sidewalls; and

etching a surface of the semiconductor substrate that defines the bottoms of the first trenches to form a plurality of bulbs extending in a direction substantially perpendicular to a longitudinal direction of the first trenches.

4. The method of claim 1 , wherein the supporters comprise an insulation material.

5. The method of claim 1 , wherein the forming of the bit lines comprises:

simultaneously etching sidewalls of the pair of body lines which are adjacent to the supporter to form a pair of openings in the sidewalls;

filling the openings with a metal; and

annealing the metal and pair of body lines to produce metal silicide bit lines.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 19, 2012
From: CHO, HEUNG-JAE; HWANG, EUI-SEONG; PARK, EUN-SHIL
To: SK HYNIX INC.
Reel/Frame 029505/0392 →
Priority Claims (1)
KR 10-2012-0094460 · Aug 28, 2012 · national
Continuity (1)
Related Publication 20140061746A1 · Mar 6, 2014