Semiconductor device with buried bit line and method for fabricating the same
A method for fabricating a semiconductor device includes etching a semiconductor substrate to form bulb-type trenches that define a plurality of active regions in the semiconductor substrate; forming a supporter in each of the bulb-type trenches; dividing each active region, of the plurality of active regions, into a pair of body lines by forming a trench through each active region; and forming a bit line in each body line of the pair of body lines.
1. A method for fabricating a semiconductor device, the method comprising:
etching a semiconductor substrate to form bulb-type trenches that define a plurality of active regions in the semiconductor substrate;
forming a supporter in each of the bulb-type trenches;
dividing each of the plurality of active regions into a pair of body lines by forming a trench through each of the plurality of active regions; and
forming a bit line in each of the pair of body lines.
2. The method of claim 1 , further comprising:
after forming the bit lines, etching the pair of body lines to form a pair of pillars, where each pillar, of the pair of pillars, includes a channel region; and
forming a capacitor connected to an upper portion of each pillar.
3. The method of claim 1 , wherein the forming of the bulb-type trenches comprises:
etching the semiconductor substrate to form a plurality of first trenches that are defined by sidewalls of the active regions;
forming spacers over the sidewalls; and
etching a surface of the semiconductor substrate that defines the bottoms of the first trenches to form a plurality of bulbs extending in a direction substantially perpendicular to a longitudinal direction of the first trenches.
4. The method of claim 1 , wherein the supporters comprise an insulation material.
5. The method of claim 1 , wherein the forming of the bit lines comprises:
simultaneously etching sidewalls of the pair of body lines which are adjacent to the supporter to form a pair of openings in the sidewalls;
filling the openings with a metal; and
annealing the metal and pair of body lines to produce metal silicide bit lines.