IP Library › Granted Patent US 9,005,539
Granted Patent B2
US 9,005,539 · App. 13/677,151 · Granted Apr 14, 2015

Chamber sealing member

Inventors: Michael Halpin (Scottsdale, AZ); Eric Shero (Phoenix, AZ); Carl White (Gilbert, AZ); Fred Alokozai (Scottsdale, AZ); Jerry Winkler (Gilbert, AZ); Todd Dunn (Cave Creek, AZ)
Assignee: ASM IP Holding B.V.
B01J19/0073B01J8/0035C23C16/4409H01L21/67126C23C16/4585
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Quick Facts
Patent No.
US 9,005,539
App. No.
13/677,151
Granted
Apr 14, 2015
Kind
B2
Abstract

A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.

Claims (39)

1. A reaction chamber comprising:

an upper region for processing a substrate;

a lower region for loading a substrate;

a susceptor movable within the reaction chamber;

a first sealing member positioned on a perimeter of the susceptor;

a second sealing member positioned between the upper region and the lower region;

wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region;

wherein the second sealing member is flexible and the first sealing member deflects the second sealing member when the susceptor is in a processing position, and

wherein the second sealing member further comprises a plurality of notches.

2. A reaction chamber comprising:

an upper region for processing a substrate;

a lower region for loading a substrate;

a susceptor movable within the reaction chamber;

a first sealing member positioned on a perimeter of the susceptor;

a second sealing member positioned between the upper region and the lower region;

wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region;

wherein the second sealing member is flexible and the first sealing member deflects the second sealing member when the susceptor is in a processing position, and

wherein the second sealing member further comprises a plurality of radially aligned slits.

3. The reaction chamber of claim 2 wherein the second sealing member further comprises two second sealing members with radially aligned slits positioned offset from each other.

4. The reaction chamber of claim 1 wherein the second sealing member further comprises two second sealing members with radially aligned slits positioned offset from each other.

5. The reaction chamber of claim 1 wherein the first sealing member is removably positioned on the susceptor.

6. The reaction chamber of claim 1 wherein the second sealing member is removably positioned between the upper region and the lower region.

7. The reaction chamber of claim 1 wherein the first sealing member travels vertically with the susceptor.

8. The reaction chamber of claim 1 further comprising a showerhead in the upper region, wherein the second sealing member is secured between the showerhead and the first sealing member.

9. The reaction chamber of claim 1 wherein a processing gas travels between the first sealing member and the second sealing member when the susceptor is in a processing position.

10. The reaction chamber of claim 1 wherein a tortuous path is defined between the first sealing member and the second sealing member.

11. The reaction chamber of claim 1 wherein the second sealing member is removably attached to an interface plate.

12. The reaction chamber of claim 1 wherein the second sealing member is secured with a mounting plate to an interface plate.

13. The reaction chamber of claim 1 wherein the second sealing member comprises two sealing members.

14. The reaction chamber of claim 2 wherein the first sealing member is removably positioned on the susceptor.

15. The reaction chamber of claim 2 wherein the second sealing member is removably positioned between the upper region and the lower region.

16. The reaction chamber of claim 2 wherein the first sealing member travels vertically with the susceptor.

17. The reaction chamber of claim 2 further comprising a showerhead in the upper region, wherein the second sealing member is secured between the showerhead and the first sealing member.

18. The reaction chamber of claim 2 wherein a processing gas travels between the first sealing member and the second sealing member when the susceptor is in a processing position.

19. The reaction chamber of claim 2 wherein a tortuous path is defined between the first sealing member and the second sealing member.

20. The reaction chamber of claim 2 wherein the second sealing member is removably attached to an interface plate.

21. The reaction chamber of claim 2 wherein the second sealing member is secured with a mounting plate to an interface plate.

22. The reaction chamber of claim 2 wherein the second sealing member comprises two sealing members.

23. The reaction chamber of claim 2 wherein the second sealing member further comprises a plurality of notches.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2012
From: HALPIN, MICHAEL; SHERO, ERIC; WHITE, CARL; ALOKOZAI, FRED; WINKLER, JERRY; DUNN, TODD
To: ASM IP HOLDING B.V.
Reel/Frame 029299/0420 →
Continuity (2)
Provisional Application 61563232 · Nov 23, 2011
Related Publication 20130129577A1 · May 23, 2013