IP Library Granted Patent US 9,016,943
Granted Patent B2
US 9,016,943 · App. 14/081,282 · Granted Apr 28, 2015

X-ray microscope system with cryogenic handling system and method

Inventors: Chris J. Jacobsen (Naperville, IL); Wenbing Yun (Walnut Creek, CA)
Assignee: Carl Zeiss X-ray Microscopy, Inc.
G01N23/04G01N23/046G21K7/00
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,016,943
App. No.
14/081,282
Granted
Apr 28, 2015
Kind
B2
Abstract

A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography.

Claims (28)

1. A cryogenic x-ray imaging method, comprising:

generating an x-ray beam that irradiates specimens;

detecting the x-ray beam from the specimens;

holding the specimens on a cryogenic base in the x-ray beam in a vacuum chamber;

positioning the specimens in the beam by rotating the cryogenic base using a positioning stage that is located entirely within the vacuum chamber;

cooling the cryogenic base via a flexible thermal linkage between the cryogenic base and a refrigeration source; and

positioning a region of interest of the specimen on the cryogenic base in the beam by moving the cryogenic base along two or more axes using the positioning stage.

2. A method as claimed in claim 1 , further comprising robotically loading and unloading specimens from the cryogenic base.

3. A method as claimed in claim 1 , further comprising positioning the cryogenic base along three axes.

4. A method as claimed in claim 1 , further comprising providing a low thermal conductivity mechanical interface between the cryogenic base and the positioning stage.

5. A method as claimed in claim 1 , further comprising thermally shielding the cryogenic base.

6. A method as claimed in claim 1 , further comprising connecting the flexible thermal linkage between the cryogenic base and a cryogenic shield for the cryogenic base.

7. A method as claimed in claim 1 , further comprising rotating the specimens by the rotation of the cryogenic base with the positioning stage and acquiring tomographic projections at different angles.

8. A method as claimed in claim 1 , further comprising collecting and focusing the x-ray beam from a source onto the specimens.

9. A method as claimed in claim 1 , further comprising using a laboratory x-ray source to generate the x-ray beam.

10. A method as claimed in claim 1 , further comprising robotically loading and unloading specimens from the cryogenic base with a robot system located within the vacuum chamber with the specimens.

11. A cryogenic x-ray imaging method, comprising:

generating an x-ray beam that irradiates specimens;

detecting the x-ray beam from the specimens;

holding the specimens on a cryogenic base in the x-ray beam in a vacuum chamber;

positioning the specimens in the beam by rotating the cryogenic base using a positioning stage that is located within the vacuum chamber;

cooling the cryogenic base via a flexible thermal linkage between the cryogenic base and a stationary cryogenic shield, which is thermally connected to a refrigeration source; and

robotically loading and unloading specimens from the cryogenic base through a loading port formed in the cryogenic shield with a robot system located within the vacuum chamber.

12. A method as claimed in claim 11 , further comprising positioning the cryogenic base along three axes in the x-ray beam with the positioning stage.

13. A method as claimed in claim 11 , further comprising providing a low thermal conductivity mechanical interface between the cryogenic base and the positioning stage.

14. A method as claimed in claim 11 , further comprising rotating the specimens and acquiring tomographic projections at different angles.

15. A method as claimed in claim 11 , further comprising using a laboratory x-ray source to generate the x-ray beam.

16. A method as claimed in claim 11 , further comprising positioning a region of interest of the specimens on the cryogenic base in the beam by moving the cryogenic base along two or more axes using the positioning stage.

Continuity (3)
Continuation 12559183 · Sep 14, 2009
Provisional Application 61096502 · Sep 12, 2008
Related Publication 20140072104A1 · Mar 13, 2014