IP Library Granted Patent US 9,059,239
Granted Patent B2
US 9,059,239 · App. 14/090,009 · Granted Jun 16, 2015

Bidirectional transistor with optimized high electron mobility current

Inventor: Rene Escoffier (La Buisse, FR)
Assignee: Commissariat a l'energie atomique et aux energies alternatives
H01L29/747H01L29/2003H01L29/7786H01L29/0623H01L29/1029H01L29/1045
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,059,239
App. No.
14/090,009
Granted
Jun 16, 2015
Kind
B2
Abstract

An apparatus includes a bidirectional hetero junction field-effect power transistor having a gate between conduction electrodes, semiconductor layers, one formed on the other, and the two meeting at an electron gas layer interface, and a reference electrode embedded in one layer. The reference electrode connects to a potential of a zone of the gas layer that is plumb with the reference electrode, A distance between the reference electrode and one conduction electrode and between the gate and that conduction electrode is between 45 and 55% of a distance between the conduction electrodes. A control circuit connected to the reference electrode generates a switching voltage for switching the transistor from a reference electrode voltage, and to apply a control voltage to the gate.

Claims (32)

1. An apparatus comprising a bidirectional hetero junction field-effect power transistor and a control circuit, wherein said bidirectional hetero-junction field-effect power transistor comprises

a first conduction electrode,

a second conduction electrode,

a gate,

a first semiconductor layer,

a second semiconductor layer, and

a reference electrode,

wherein said gate is placed between said first conduction electrode and said second conduction electrode,

wherein a distance between said gate and said first conduction electrode is between 45% and 55% of a distance between said first conduction electrode and said second conduction electrode;

wherein said second semiconductor layer is formed on said first semiconductor layer,

wherein said first semiconductor layer and said second semiconductor layer meet at an interface,

wherein said first semiconductor layer and said and second semiconductor layer form an electron gas layer at said interface,

wherein said reference electrode is embedded in said first semiconductor layer,

wherein said reference electrode is electrically connected to a potential of a zone of said electron gas layer that is located plumb with said reference electrode,

wherein a distance between said reference electrode and said first conduction electrode is between 45 and 55% of a distance between said first conduction electrode and said second conduction electrode; and

wherein said control circuit is connected to said reference electrode,

wherein said control circuit is programmed to generate a switching voltage for switching said field-effect power transistor from a voltage of said reference electrode, and

wherein said control circuit is programmed to apply a control voltage to said gate.

2. The apparatus of claim 1 , wherein said electrode is plumb with said gate.

3. The apparatus of claim 1 , wherein said reference electrode is equidistant from said first and second conduction electrodes.

4. The apparatus of claim 1 , wherein said reference electrode comprises a dopant implant embedded in said first semiconductor layer.

5. The apparatus of claim 4 , wherein a maximum dopant density in said implant is disposed between 10 nm and 80 nm from said electron gas layer.

6. The apparatus of claim 4 , wherein said implant has a depth that extends through said first semiconductor layer from said interface between said first semiconductor layer and said second semiconductor layer.

7. The apparatus of claim 4 , wherein said implant is separated from said interface by a thickness of semiconductor, wherein said thickness is between 5 nm and 25 nm.

8. The apparatus of claim 1 , wherein said electron gas layer extends continuously between said first and second electrodes.

9. The apparatus of claim 4 , wherein said dopant implant is doped with a dopant chosen from the group consisting of Mg, Si, Zn, Cr, and Fe.

10. The apparatus of claim 4 , wherein said implant has a maximum dopant density between 10 18 cm −3 and 10 21 cm −3 .

11. The apparatus of claim 1 , wherein said first semiconductor layer comprises a binary nitride alloy.

12. The apparatus of claim 11 , wherein said binary nitride alloy comprises GaN.

13. The apparatus of claim 1 , wherein said second semiconductor layer comprises a ternary nitride alloy.

14. The apparatus of claim 13 , wherein said ternary nitride alloy is AlGaN.

15. The apparatus of claim 1 , further comprising a voltage source configured for applying a potential difference higher than 100 V between said first and second conduction electrodes of said transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 7, 2014
From: ESCOFFIER, RENE
To: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Reel/Frame 031906/0168 →
Priority Claims (1)
FR 12 61252 · Nov 26, 2012 · national
Continuity (1)
Related Publication 20140145203A1 · May 29, 2014