Semiconductor module and a method for fabrication thereof by extended embedding technologies
The semiconductor module includes a carrier, a plurality of semiconductor transistor chips disposed on the carrier, a plurality of semiconductor diode chips disposed on the carrier, an encapsulation layer disposed above the semiconductor transistor chips and the semiconductor diode chips, and a metallization layer disposed above the encapsulation layer. The metallization layer includes a plurality of metallic areas forming electrical connections between selected ones of the semiconductor transistor chips and the semiconductor diode chips.
1. A semiconductor module, comprising:
a contiguous carrier comprising an upper surface, a lower surface and side faces connecting the upper surface to the lower surface;
a plurality of semiconductor chips disposed on the contiguous carrier;
an encapsulation layer disposed above the semiconductor chips, the encapsulation layer covering the upper surface and the side faces of the contiguous carrier; and
a metallization layer disposed above the encapsulation layer, the metallization layer comprising a plurality of metallic areas forming electrical connections between selected ones of the semiconductor chips.
2. The semiconductor module according to claim 1 , comprising at least one semiconductor transistor chip and at least one semiconductor diode chip disposed on the contiguous carrier.
3. The semiconductor module according to claim 2 , wherein the encapsulation layer comprises via connections connecting the metallic areas with selected ones of the at least one semiconductor transistor chip and the at least one semiconductor diode chip.
4. The semiconductor module according to claim 2 , wherein each one of the at least one semiconductor transistor chip is connected with one of the at least one semiconductor diode chip in parallel.
5. The semiconductor according to claim 1 , wherein the contiguous carrier comprises an inorganic substrate.
6. The semiconductor module according to claim 1 , wherein
the contiguous carrier comprises one or more of a direct copper bonded substrate, a direct aluminum bonded substrate, and an active metal brazing substrate, and wherein the substrate comprises a ceramic layer or a dielectric layer.
7. The semiconductor module according to claim 1 , wherein the contiguous carrier comprises an organic composite substrate.
8. The semiconductor module according claim 7 , wherein a core of the organic substrate has a thermal conductivity greater than 1 W/mK.
9. The semiconductor module according to claim 1 , wherein the contiguous carrier has a thickness in a range from 0.1 mm to 0.7 mm.
10. The semiconductor module according to claim 9 , wherein the encapsulation layer comprises vias having lateral diameters greater than 50 μm.
11. The semiconductor module according to claim 1 , wherein the encapsulation layer has a thickness in a range from 0.05 mm to 1 mm.
12. The semiconductor module according to claim 1 , wherein the encapsulation layer comprises one or more of a polymer material, a mold material, a resin material, an epoxy resin material, an acrylate material, polyimide material, and a silicone-based material.
13. The semiconductor module according to claim 1 , wherein the contiguous carrier comprises a first upper main face, a second lower main face opposite to the first main face, and side faces connecting the first and second main faces, wherein the plurality of semiconductor chips is disposed on the first main face and the encapsulation layer covers the first main face and the side faces of the contiguous carrier.
14. A semiconductor module, comprising:
a carrier;
a plurality of semiconductor transistor chips disposed on the carrier;
a plurality of semiconductor diode chips disposed on the carrier;
an encapsulation layer disposed above the semiconductor transistor chips and the semiconductor diode chips, the encapsulation layer comprising via connections to the semiconductor transistor chips and the semiconductor diode chips;
a metallization layer comprising a plurality of metallic areas connected with the via connections; and
a plurality of pins connected with the metallization layer and configured to serves as external electrical connectors.
15. The semiconductor module according to claim 14 , wherein the carrier comprises a ceramic layer.
16. The semiconductor module according to claim 14 , wherein the semiconductor transistor chips and the semi-conductor diode chips are connected to form an AC/AC converter circuit, an AC/DC converter circuit, a DC/AC converter circuit, a frequency converter or a DC/DC converter circuit.
17. A method for fabricating a semiconductor module, the method comprising:
providing a plurality of carriers;
applying a plurality of semiconductor chips onto each carrier of the plurality of carriers;
applying an encapsulation layer above the plurality of semiconductor chips and the plurality of carriers;
forming via connections into the encapsulation layer, the via connections being connected with the plurality of semiconductor chips and the plurality of carriers; and
applying a metallization layer above the encapsulation layer, the metallization layer comprising a plurality of metallic areas connected with the via connections.
18. The method according to claim 17 , wherein the encapsulation layer is applied on an upper main face and side faces of the carrier.
19. The method according to claim 17 , wherein forming the via connections comprises forming via holes by laser drilling and filling a metallic material into the via holes.