Method for making graphene composite structure
A method for making a graphene composite structure includes providing a metal substrate including a first surface and a second surface opposite to the first surface, growing a graphene film on the first surface of the metal substrate by a CVD method, providing a polymer layer on the graphene film and combining the polymer layer with the graphene film, and forming a plurality of stripped electrodes by etching the metal substrate from the second surface.
1. A method for making a graphene composite structure, the method comprising:
growing a graphene film on a first surface of a metal substrate by a CVD method, wherein the metal substrate has a second surface opposite to the first surface;
layering a polymer layer on the graphene film, wherein the polymer layer is directly in contact with a surface of the graphene film away from the metal substrate;
combining the polymer layer with the graphene film while the graphene film remains attached to the metal substrate during the combining process; and
etching the metal substrate from the second surface to form a plurality of stripped electrodes.
2. The method of claim 1 , wherein the metal substrate has a thickness in a range from about 100 nanometers to about 100 micrometers.
3. The method of claim 2 , wherein the metal substrate is made of copper or nickel.
4. The method of claim 1 , wherein the graphene film is grown on the first surface of the metal substrate by the steps of:
disposing the metal substrate in a reacting chamber;
heating the metal substrate to a predetermined temperature; and
supplying a carbon source gas into the reacting chamber until the graphene film is formed on the first surface of the metal substrate.
5. The method of claim 4 , further comprising importing hydrogen gas into the reacting chamber during the process of heating the metal substrate to the predetermined temperature.
6. The method of claim 5 , wherein the predetermined temperature is in a range from about 800° C. to about 1500° C.
7. The method of claim 5 , further comprising continuously importing the hydrogen gas into the reacting chamber until the graphene film is formed on the first surface of the metal substrate.
8. The method of claim 7 , further comprising controlling a ratio between flow rates of the carbon source gas and the hydrogen gas in a range from about 45:2 to about 15:2.
9. The method of claim 8 , further comprising cooling the metal substrate after the graphene film is formed, and continuously flowing the carbon source gas and the hydrogen gas into the reacting chamber during the cooling of the metal substrate.
10. The method of claim 1 , wherein the polymer layer and the graphene film are combined by a hot-pressing method.
11. The method of claim 10 , wherein the polymer layer comprises a material selected from the group consisting of polystyrene, polyethylene, polycarbonate, polymethyl methacrylate (PMMA), polycarbonate (PC), terephthalate (PET), benzo cyclo butene (BCB), and polyalkenamer.
12. The method of claim 1 , wherein the step of etching the metal substrate from the second surface to form the plurality of stripped electrodes comprises:
applying a sacrifice layer on the second surface of the metal substrate , wherein the sacrifice layer defines a plurality of spaced sacrifice stripped grooves to expose the second surface of the metal substrate;
etching the metal substrate exposed from the sacrifice layer, thereby forming the plurality of stripped electrodes spaced from each other and exposing a part of the graphene film; and
removing the sacrifice layer.
13. The method of claim 12 , wherein the sacrifice layer comprises a material selected from the group consisting of polymethyl methacrylate, ethoxyline resin, unsaturated polyester, and silicon ether resin.
14. The method of claim 12 , wherein etching the metal substrate exposed from the sacrifice layer comprises:
disposing the metal substrate with the sacrifice layer in an inductive coupling plasma system; and
etching the metal substrate exposed from the sacrifice layer using oxygen and chlorine gas, thereby exposing the graphene film.
15. A method for making a graphene composite structure, the method comprising:
growing a graphene film on a first surface of a metal substrate by a CVD method, wherein the metal substrate has a second surface opposite to the first surface;
combining a polymer layer with the graphene film, wherein the graphene film remains attached on the metal substrate during the combining of the polymer layer with the graphene film, and the polymer layer is directly in contact with the graphene film; and
etching the metal substrate from the second surface to form a plurality of stripped electrodes.
16. The method of claim 15 , wherein the graphene film is grown on the first surface of the metal substrate by the steps of:
disposing the metal substrate in a reacting chamber;
heating the metal substrate to a predetermined temperature; and
supplying a carbon source gas into the reacting chamber until the graphene film is formed on the first surface of the metal substrate.
17. The method of claim 16 , further comprising importing hydrogen gas into the reacting chamber during the process of heating the metal substrate to the predetermined temperature.
18. The method of claim 17 , wherein the predetermined temperature is in a range from about 800° C. to about 1500° C.
19. The method of claim 17 , further comprising continuously importing the hydrogen gas into the reacting chamber until the graphene film is formed on the first surface of the metal substrate.
20. The method of claim 19 , further comprising controlling a ratio between flow rates of the carbon source gas and the hydrogen gas in a range from about 45:2 to about 15:2.