Multi-array ultrasonic probe apparatus and method for manufacturing multi-array probe apparatus

1. A multi-array ultrasonic probe apparatus, comprising:

n tiles which transmit and receive ultrasonic beams; and

a substrate comprising:

n guide portions on which the n tiles are mounted, respectively, to be aligned in a multi-array, each of the n guide portions comprising:

first sides extending from a surface of the substrate substantially perpendicularly to the surface of the substrate, and

opposing ledges which extend from the first sides substantially perpendicularly to the first sides; and

n adhesive portions which are disposed underneath the n guide portions and formed as cavities between the opposing ledges within respective guide portions, each of the n adhesive portions comprising:

second sides extending downward from the opposing ledges of a respective guide portion, and

a bottom surface which extends from one of the second sides to another one of the second sides;

wherein an adhesive material is placed into a respective adhesive portion to attach each respective tile to the substrate, and

opposing side portions of each respective tile are disposed on the opposing ledges of the respective guide portion and a center portion of each respective tile is disposed over the cavity of each respective adhesive portion.

2. The apparatus of claim 1 , wherein the substrate further comprises:

n outlets which discharge, to an outside of the substrate, an excess of the adhesive material when the n tiles are being mounted on the n guide portions.

3. The apparatus of claim 1 , wherein widths of the n guide portions are wider than widths of corresponding n adhesive portions.

4. The apparatus of claim 1 , wherein each of the n guide portions has identical heights, and each of the n adhesive portions has identical heights.

5. The apparatus of claim 1 , wherein:

the n guide portions are disposed in a matrix on the substrate with a first predetermined gap between adjacent guide portions to separate the adjacent guide portions from one another, and

the n adhesive portions are disposed in a matrix on the substrate with a second predetermined gap between adjacent adhesive portions to separate the adjacent adhesive portions from one another.

6. The apparatus of claim 1 , wherein widths of the n guide portions are wider than widths of the n tiles by a predetermined size.

7. The apparatus of claim 1 , wherein each of the n tiles comprises:

an Application Specific Integrated Circuit (ASIC), a lower portion of which is disposed proximate the respective adhesive portion, and

a Capacitive Micromachined Ultrasonic Transducer (CMUT) attached to an upper portion of the ASIC.

8. The apparatus of claim 1 , wherein the substrate comprises one of silicon, glass, and a polymer-based material.

9. A method of manufacturing a multi-array ultrasonic probe apparatus comprising n tiles which transmit and receive ultrasonic beams; and a substrate comprising n guide portions on which the n tiles are mounted, respectively, to be aligned in a multi-array, each of the n guide portions comprising first sides extending from a surface of the substrate substantially perpendicularly to the surface of the substrate, and opposing ledges which extend from the first sides substantially perpendicularly to the first sides; and n adhesive portions which are disposed underneath the n guide portions and formed as cavities between the opposing ledges within respective guide portions, each of the n adhesive portions comprising second sides extending downward from the opposing ledges of a respective guide portion, and a bottom surface which extends from one of the second sides to another one of the second sides; wherein an adhesive material is placed into a respective adhesive portion to attach each respective tile to the substrate, and opposing side portions of each respective tile are disposed on the opposing ledges of the respective guide portion and a center portion of each respective tile is disposed over the cavity of each respective adhesive portion,

the method comprising:

providing the substrate comprising the n guide portions and the n adhesive portions proximate to a lower portion of the n guide portions; and

aligning the n tiles, which transmit and receive ultrasonic beams, in the multi-array by mounting the n tiles on the n guide portions, respectively.

10. The method of claim 9 , wherein the providing further comprises:

providing the substrate with n outlets which discharge, to an outside of the substrate, an excess of the adhesive material when the n tiles are being mounted on the n guide portions.

11. The method of claim 9 , wherein the n guide portions have widths wider than widths of corresponding n adhesive portions.

12. The method of claim 9 , wherein each of the n guide portions has identical heights, and

each of the n adhesive portions has identical heights.

13. The method of claim 9 , wherein the n guide portions are disposed in a matrix with a first predetermined gap between adjacent guide portions to separate the adjacent guide portions from one another, and

the n adhesive portions are disposed in a matrix with a second gap between adjacent guide portions to separate the adjacent adhesive portions from one another.

14. The method of claim 9 , wherein the n guide portions have widths wider than widths of the n tiles by a predetermined size.

15. The method of claim 9 , wherein each of the n tiles comprises an Application Specific Integrated Circuit (ASIC), and a Capacitive Micromachined Ultrasonic Transducer (CMUT) attached to an upper portion of the ASIC, and

the aligning comprises mounting a lower portion of the ASIC onto respective guide portions.

16. The method of claim 9 , wherein the substrate comprises one of silicon, glass, and a polymer-based material.

17. A device comprising:

a substrate;

n tiles aligned on the substrate in a multi-array, to transmit and receive ultrasonic beams; and

n mounting portions which are disposed on the substrate separated from one another, each of the n mounting portions comprising a guide portion which aligns each respective tile on the substrate, the guide portion comprising:

first sides extending from a surface of the substrate substantially perpendicularly with respect to the surface of the substrate, and

opposing ledges which extend from the first sides at a first height from the surface of the substrate, substantially perpendicularly with respect to the first sides; and adhesive portions which are disposed underneath respective guide portions and formed as cavities between the opposing ledges within the respective guide portions, each of the adhesive portions comprising:

second sides extending downward from the opposing ledges of a respective guide portion, and

a bottom surface which extends from one of the second sides to another one of the second sides;

wherein an adhesive material is placed into a respective adhesive portion to attach each respective tile to the substrate, and

opposing side portions of each respective tile are disposed on the opposing ledges of the respective guide portion and a center portion of each respective tile is disposed over the cavity of each respective adhesive portion.

18. The device of claim 17 , wherein

the bottom surface of each adhesive portion is disposed at a second height greater than the first height, from the surface of the substrate, and attaches each respective tile to the substrate.

19. The device of claim 18 , wherein the substrate further comprises:

outlets each of which extends from a respective cavity to an outside of the substrate and discharges an excess of the adhesive material which builds up in the respective adhesive portion when the tiles are being mounted onto respective mounting portions.