Semiconductor device and method for manufacturing the same
It is an object to provide a semiconductor device including a thin film transistor with favorable electric properties and high reliability, and a method for manufacturing the semiconductor device with high productivity. In an inverted staggered (bottom gate) thin film transistor, an oxide semiconductor film containing In, Ga, and Zn is used as a semiconductor layer, and a buffer layer formed using a metal oxide layer is provided between the semiconductor layer and a source and drain electrode layers. The metal oxide layer is intentionally provided as the buffer layer between the semiconductor layer and the source and drain electrode layers, whereby ohmic contact is obtained.
1. A method of manufacturing a semiconductor device comprising the steps of:
forming an insulating film comprising silicon and excessive oxygen;
forming an oxide semiconductor film in contact with the insulating film, the oxide semiconductor film including a channel formation region;
forming a conductive film over the oxide semiconductor film;
selectively etching the conductive film to form a source electrode and a drain electrode,
treating an upper surface of the oxide semiconductor film with a plasma of gas containing oxygen without applying a bias;
forming an insulating film on the oxide semiconductor film after treating the upper surface of the oxide semiconductor film; and
forming a gate electrode adjacent to the oxide semiconductor film,
wherein the step of treating the upper surface of the oxide semiconductor film with the plasma of gas containing oxygen is performed after selectively etching the conductive film, and
wherein the oxide semiconductor film comprises indium, gallium, and zinc.
2. The method according to claim 1 , wherein the insulating film is formed over the oxide semiconductor film.
3. The method according to claim 1 , wherein the gate electrode is located below the oxide semiconductor film.
4. The method according to claim 1 , wherein the insulating film is formed by sputtering.
5. The method according to claim 1 , wherein the oxide semiconductor film comprises indium.
6. A method of manufacturing a semiconductor device comprising:
forming an insulating film comprising silicon and oxygen;
forming an oxide semiconductor film in contact with the insulating film, the oxide semiconductor film including a channel formation region;
forming a conductive film over the oxide semiconductor film;
selectively etching the conductive film to form a source electrode and a drain electrode;
treating an upper surface of the oxide semiconductor film with a plasma of gas containing oxygen without applying a bias;
forming an insulating film on the oxide semiconductor film after treating the upper surface of the oxide semiconductor film; and
forming a gate electrode adjacent to the oxide semiconductor film,
wherein the oxide semiconductor film contains excessive oxygen,
wherein the step of treating the upper surface of the oxide semiconductor film with the plasma of gas containing oxygen is performed after selectively etching the conductive film, and
wherein the oxide semiconductor film comprises indium, gallium, and zinc.
7. The method according to claim 6 , wherein the insulating film is formed over the oxide semiconductor film.
8. The method according to claim 6 , wherein the gate electrode is located below the oxide semiconductor film.
9. The method according to claim 6 , wherein the insulating film is formed by sputtering.
10. The method according to claim 6 , wherein the oxide semiconductor film comprises indium.
11. The method according to claim 1 , wherein the gas contains O 2 or N 2 O.
12. The method according to claim 6 , wherein the gas contains O 2 or N 2 O.